Electrochemical pyrolytic carbon resonators for mass sensing on electrodeposited polymers

Quang, Long Nguyen; Halder, Arnab; Rezaei, Babak; Larsen, Peter E.; Sun, Yi; Boisen, Anja; Keller, Stephan Sylvest

doi:10.1016/j.mne.2019.01.001

Cited by 7 publications

(8 citation statements)

References 27 publications

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“…Figure 1b shows an SEM image (inset) and the first mode resonance frequency peak of a pyrolytic carbon resonator with a nominal length of 400 µm, a nominal width of 30 µm and a thickness of 0.6 µm. The resonance frequencies of the pyrolytic carbon resonator were 233 ± 4 kHz for the first mode and 550 ± 7 kHz for the second mode, which are similar to the values previously reported for devices fabricated under the same pyrolysis conditions 34 . For ideal string-like resonators, the ratio between the frequencies of the second and first modes is 2, whereas for completely stress-free doubly clamped beams, it is 2.76 36 .…”

Section: Resultssupporting

confidence: 87%

“…The C-MEMS method was applied for the fabrication of doubly clamped pyrolytic carbon resonators following a process similar to that previously described 34 . The final design of the devices is shown in Fig.…”

Section: Resultsmentioning

confidence: 99%

“…The fabrication process of pyrolytic carbon resonators used in this study was previously described in detail 34 . Briefly, pyrolytic carbon resonators were fabricated using silicon nitride dry etching, SU-8 photolithography, isotropic silicon etching, pyrolysis and e-beam metal evaporation.…”

Section: Methodsmentioning

confidence: 99%

“…The optimized micromechanical string resonators display excellent resonant behavior, which has been suitable for applications such as mass sensing and nanomechanical infrared (NAM-IR) spectroscopy 33 . Further optimization of the process resulted in doubly clamped pyrolytic carbon resonators that are electrically conductive, and this property has been explored for the electrodeposition of nanoparticles on suspended structures 34 . Recently, Salazar et al fabricated suspended pyrolytic carbon nanowires by electromechanical spinning and demonstrated resistive heating that could locally reach temperatures >2000 °C 35 .…”

Section: Introductionmentioning

confidence: 99%

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Pyrolytic carbon resonators for micromechanical thermal analysis

Nguyen

Larsen

et al. 2019

Microsyst Nanoeng

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Thermal analysis is essential for the characterization of polymers and drugs. However, the currently established methods require a large amount of sample. Here, we present pyrolytic carbon resonators as promising tools for micromechanical thermal analysis (MTA) of nanograms of polymers. Doubly clamped pre-stressed beams with a resonance frequency of 233 ± 4 kHz and a quality factor (Q factor) of 800 ± 200 were fabricated. Optimization of the electrical conductivity of the pyrolytic carbon allowed us to explore resistive heating for integrated temperature control. MTA was achieved by monitoring the resonance frequency and quality factor of the carbon resonators with and without a deposited sample as a function of temperature. To prove the potential of pyrolytic carbon resonators as thermal analysis tools, the glass transition temperature (Tg) of semicrystalline poly(L-lactic acid) (PLLA) and the melting temperature (Tm) of poly(caprolactone) (PCL) were determined. The results show that the Tg of PLLA and Tm of PCL are 61.0 ± 0.8 °C and 60.0 ± 1.0 °C, respectively, which are in excellent agreement with the values measured by differential scanning calorimetry (DSC).

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Section: Resultssupporting

confidence: 87%

Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Pyrolytic carbon resonators for micromechanical thermal analysis

Nguyen

Larsen

et al. 2019

Microsyst Nanoeng

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“…Carbon-based electrode materials play an important role in the development of SC [7,8,9]. The increasing demand for high-performance SC has attracted a great deal of research into the top-level design and precise control of complex three-dimensional carbon structures [10,11]. Both the porous structure and surface area of the electrode materials can be optimized through reasonable design to improve their electrochemical properties.…”

Section: Introductionmentioning

confidence: 99%

Graphene/Carbon Paper Combined with Redox Active Electrolyte for Supercapacitors with High Performance

Xia

Meng

et al. 2019

Polymers

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Graphene/carbon paper is prepared by pyrolyzing graphene modified cellulose filter paper and directly used as a binder-free electrode to assemble a supercapacitor (SC) with a redox active electrolyte, containing a Fe3+/Fe2+ additive. By the graphene incorporation and the carbonization of the cellulose fibers, both the microstructure and the electrical conductivity of the carbon paper are promoted greatly. The filter paper derived carbon (FPC) electrode exhibits a specific capacitance (Cs) of 2832 F·g−1 in a 1 M H2SO4 + 0.5 M Fe3+/Fe2+ electrolyte at 1 A·g−1, which is about 81 times that in a normal H2SO4 electrolyte. With the modification of graphene, the capacitive performance of the SC is enhanced further and a remarkable Cs of 3396 F·g−1 at 1 A·g−1 is achieved for a graphene modified filter paper carbon (GFPC) electrode, which remains at ~632 F·g−1 at 10 A·g−1. The free standing GFPC electrode also exhibits good cycling stability (93.8% of capacitance retention after 2000 cycles) and an energy density of 118 Wh·kg−1 at a power density of 500.35 W·kg−1, all of which are much higher than those of FPC. These encouraging results suggest that the graphene modification of electrode materials combined with a Fe3+/Fe2+ redox active electrolyte is a prospective measure to fabricate SC with an ultrahigh performance.

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