Electrochemical Microstructuring with Short Voltage Pulses

Schuster, Rolf

doi:10.1002/cphc.200600401

Cited by 47 publications

(28 citation statements)

References 29 publications

(35 reference statements)

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“…A more detailed discussion can be found in ref. [19,20]. The method is based on the finite charging time for the charging of the electrochemical double layer on the electrodes' surfaces.…”

Section: Electrochemical Micromachining Of Aumentioning

confidence: 99%

“…[12][13][14][15][16] While the Au nanostructures were formed by conventional lithographic methods [17] or focussed ion beam milling, [2,10,18] in most of these applications, herein, we want to present an electrochemical route for the fabrication of Au micro-and nanostructures. [19,20] It is based on the application of short voltage pulses of nanosecond duration to a tool electrode in electrochemical environment. The tool electrode is moved through the workpiece similar to a miniature milling cutter upon electrochemical removal of material.…”

Section: Introductionmentioning

confidence: 99%

“…The method was demonstrated for the machining of Cu, stainless steel and similar materials in aqueous electrolytes. [20][21][22] Recently ionic liquids were also applied as electrolytes for the machining of iron. [23] Although submicrometer machining resolution was possible in aqueous electrolytes, it required the application of picosecond pulses, which is experimentally very challenging and far from routine.…”

Section: Introductionmentioning

confidence: 99%

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Electrochemical Machining of Gold Microstructures in LiCl/Dimethyl Sulfoxide

Bán

Schuster

2010

ChemPhysChem

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LiCl/dimethyl sulfoxide (DMSO) electrolytes were applied for the electrochemical micromachining of Au. Upon the application of short potential pulses in the nanosecond range to a small carbon-fiber electrode, three-dimensional microstructures with high aspect ratios were fabricated. We achieved machining resolutions down to about 100 nm. In order to find appropriate machining parameters, that is, tool and workpiece rest potentials, the electrochemical behavior of Au in LiCl/DMSO solutions with and without addition of water was studied by cyclic voltammetry. In waterless electrolyte Au dissolves predominantly as Au(I), whereas upon the addition of water the formation of Au(III) becomes increasingly important. Because of the low conductivity of LiCl/DMSO compared with aqueous electrolytes, high machining precision is obtained with moderately short pulses. Furthermore, the redeposition of dissolved Au can be effectively avoided, since Au dissolution in LiCl/DMSO is highly irreversible. Both observations render LiCl/DMSO an appropriate electrolyte for the routine electrochemical micromachining of Au.

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“…A more detailed discussion can be found in ref. [19,20]. The method is based on the finite charging time for the charging of the electrochemical double layer on the electrodes' surfaces.…”

Section: Electrochemical Micromachining Of Aumentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Electrochemical Machining of Gold Microstructures in LiCl/Dimethyl Sulfoxide

Bán

Schuster

2010

ChemPhysChem

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“…In electrochemical machining of stainless steel, the productions of work piece are hydroxide. To dissolve the hydroxide, acids, for example, hydrochloric acid, sulphuric acid are usually used as electrolyte (Schuster, 2007;Ryu, 2008). These electrolytes are toxic and corrosive.…”

Section: Introductionmentioning

confidence: 99%

Effects of Complexing Agent on Electrochemical Micro Machining of Stainless Steel

Chen¹,

Wang²,

Wang³

et al. 2010

American Journal of Nanotechnology

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Problem statement: Electrochemical Machining (ECM) is a prospective technique in micro machining. The productions of work piece in ECM are precipitation of hydroxide, which will block the machining gap. To prevent the formation of hydroxide, acids were often used. To machining work piece which is not acid-resistant, acids are not suitable. Approach: This study is conducted to find the effects of complexing agent on Electrochemical Micro Machining (ECM) of stainless steel. Compared to acids, the complexing agent is non-toxic and non-corrosive. ECM of stainless steel by applying short pulses in sodium chlorate electrolyte added with complexing agent is researched. Ethylenediaminetetraacetic acid disodium salt (EDTA-Na2) is a kind of widely used complexing agent. The usage of EDTA-Na2 prevented the formation of hydroxide. On the other hand, without EDTA-Na2, the electrode was attached with precipitation of hydroxide and short circuit occurred frequently. Results: Experiments results indicated that EDTA-Na2 can avoid the short circuit and not increase the side gap of electrochemical machining. Conclusion: EDTA-Na2 can form complex compound with ions of anode and dissolved in electrolyte. It is a kind of effective complexing agent in electrochemical machining of stainless steel.

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“…This technique exploits the capacitive properties of the electrical double layer (EDL) at the electrode/electrolyte interfaces: it has been demonstrated that the electrical model of the electrochemical cell is a RC circuit [11][12][13][14][15]. The charging constant (τ = RC , where C is the overall capacitance of the cell and R is the electrolyte resistance) of the EDL depends on the distance between the tool and the workpiece (which actually corresponds to the charging current path): the further the tool is from the workpiece surface, the longer the charging time of the EDL will be.…”

Section: Fundamentalsmentioning

confidence: 99%

Design of an electrochemical micromachining machine

Spieser

Ivanov

2014

Int J Adv Manuf Technol

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Electrochemical micromachining (µECM) is a nonconventional machining process based on the phenomenon of electrolysis. µECM became an attractive area of research due to the fact that this process does not create any defective layer after machining and that there is a growing demand for better surface integrity on different micro applications including microfluidics systems, stress free drilled holes in automotive and aerospace manufacturing with complex shapes etc.This work presents the design of a next generation µECM machine for the automotive, aerospace, medical and metrology sectors. It has 3 axes of motion (X,Y,Z) and a spindle allowing the tool-electrode to rotate during machining.The linear slides for each axis use air bearings with linear DC brushless motors and 2nm-resolution encoders for ultra precise motion. The control system is based on the Power PMAC motion controller from Delta Tau. The electrolyte tank is located at the rear of the machine and allows the electrolyte to be changed quickly. This machine features two process control algorithms: fuzzy logic control and adaptive feed rate.A self-developed pulse generator has been mounted and interfaced with the machine and a wire ECM grinding device has been added. The pulse generator has the possibility to reverse the pulse polarity for on-line tool fabrication.

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Electrochemical Microstructuring with Short Voltage Pulses

Cited by 47 publications

References 29 publications

Electrochemical Machining of Gold Microstructures in LiCl/Dimethyl Sulfoxide

Electrochemical Machining of Gold Microstructures in LiCl/Dimethyl Sulfoxide

Effects of Complexing Agent on Electrochemical Micro Machining of Stainless Steel

Design of an electrochemical micromachining machine

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