Electrochemical micromachining of microstructures of micro hole and dimple array

Zhu, Daiyin; Qu, Ningsong; Li, H.S.; Zeng, Yongbin; Li, D.L.; Qian, Shuqu

doi:10.1016/j.cirp.2009.03.004

Cited by 135 publications

(49 citation statements)

References 9 publications

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“…Laser thermochemical etching of metals can be achieved in solutions of acids using pulsed or continuous wave (CW) lasers. Compared to electrochemical machining (ECM), that also allows the processing of conductive materials regardless of their hardness [119], LCM/E's aspect ratio is much smaller [120] but it has good agreement with better resolution [121] and surface roughness [122]. In comparison to direct laser ablation the MRR and aspect ratio of LCM/E are smaller but it involves little heat generation [123] and thus thermal effects do not occur [124].…”

Section: Laser Chemical Machining/etching (Lcm/e)mentioning

confidence: 93%

Laser Beam Machining, Laser Beam Hybrid Machining, and Micro-channels Applications and Fabrication Techniques

Darwish

Ahmed

Al‐Ahmari

2016

Machining, Joining and Modifications of Advanced Materials

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Laser beam machining (LBM) has proven its applications and advantages over almost all the range of engineering materials. It offers its competences from macro machining to micro and nano-machining of simple-to-complex shapes. The flipside of LBM is the existence of universal problems associated with its thermal ablation mechanism. In order to alleviate or reduce the inherent problems of LBM, a massive research has been done during the past decade and in turn build a relatively new route of laser-hybrid processes. The hybrid approaches in laser ablation have demonstrated much improved results in terms of material removal rate, surface integrity, geometrical tolerances, thermal damage, metallurgical alterations and many more. This chapter reviews the research work carried out so far in the area of LBM and its hybrid processes for different materials and shapes.

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Section: Laser Chemical Machining/etching (Lcm/e)mentioning

confidence: 93%

Laser Beam Machining, Laser Beam Hybrid Machining, and Micro-channels Applications and Fabrication Techniques

Darwish

Ahmed

Al‐Ahmari

2016

Machining, Joining and Modifications of Advanced Materials

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“…Various techniques have been developed to produce surface texturing, such as abrasive jet machining [3], micro-milling [4], electrical discharge machining [5], laser beam machining [6], and electrochemical micromachining (EMM) [7].…”

Section: Introductionmentioning

confidence: 99%

Investigation of machining accuracy of micro-dimples fabricated by modified microscale pattern transfer without photolithography of substrates

Zhang

et al. 2015

Int J Adv Manuf Technol

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Micro-dimples are among the basic microfeatures that have been applied to different products in various fields. The product performance and service life of textured surfaces are directly affected by size, location, and density. A modified microscale pattern transfer process without photolithography of substrates, through the use of movable dry-film mask electrochemical micromachining, has been proposed for the production of micro-dimples. This paper investigates the influence of electrochemical micromachining parameters, namely, applied voltage and machining time on the machining accuracy of micro-dimples produced using this technique. Experimental results indicate that the machining accuracy deteriorates with prolonged machining time and increasing applied voltage. It is found that to obtain high machining accuracy when machining micro-dimples of similar depth, a combination of higher current density with reduced machining time is recommended.

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“…As one of the mainstream processes for producing precision metal screen, electrochemical shaping process has attracted more attentions because of its some outstanding advantages including low operation temperature, large machinability to a variety of metals, good surface quality, and favorable implementability of one-step shape, etc. [2][3][4][5][6][7]. Electroforming by means of additive manufacturing mechanism and mask electrochemical machining (M-ECM) using subtractive manufacturing mechanism are the two typical application forms of electrochemical shaping for fabricating metal screen.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of through-hole with biconically shaped cross sections by using electroforming and inert metal mask electrochemical machining

Ming

Bao

Qiaoling

et al. 2014

Int J Adv Manuf Technol

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Based on the inert metal perforation plate acted as both mandrel and mask, a hybrid electrochemical fabrication process combining electroforming and mask electrochemical machining was proposed to manufacture metal through-hole arrays with double tapered openings. The feasibility of this novel hybrid process was first investigated theoretically according to developed numerical models, and then, the effect of structure parameters of the inert metal plate on profile characteristics of the through-hole being processed was numerically analyzed where optimal structure parameters were further determined. Subsequent experimental results, on the whole, agreed with those from numerical analysis. Research results showed that the profile characteristics of the shaped throughhole were significantly dependent on the structure parameters of the inert metal plate used. Smaller through-holes with a better symmetry between the opening profiles can be achieved if the inert metal plates with bigger thickness and larger hole wall angle were used. With the reduction of hole spacing in the inert metal plate, the achievable aspect ratio of the machined through-hole gradually increased, and the profile symmetry between entry and exit became better. With the increase of hole size of the patterned inert metal plate, the thickness limitation of the through-hole plates that can be achieved rose, but the minimum diameter tended to be smaller and the symmetry worsened. In addition, nonconventional inward horn-shaped profile can be shaped in the mask electrochemical machining step only when the inert metal plates having small hole spacing and hole wall angle are utilized. With a diameter deviation between the entry and the exit, 9.7 % and an expanding rate 110.1 %, favorable through-holes featuring good opening profile symmetry (88.8 %) and smooth surfaces can be machined using this hybrid process.

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Electrochemical micromachining of microstructures of micro hole and dimple array

Cited by 135 publications

References 9 publications

Laser Beam Machining, Laser Beam Hybrid Machining, and Micro-channels Applications and Fabrication Techniques

Laser Beam Machining, Laser Beam Hybrid Machining, and Micro-channels Applications and Fabrication Techniques

Investigation of machining accuracy of micro-dimples fabricated by modified microscale pattern transfer without photolithography of substrates

Fabrication of through-hole with biconically shaped cross sections by using electroforming and inert metal mask electrochemical machining

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