Electrochemical mechanical polishing technology: recent developments and future research and industrial needs

Mohammad, Abdelkhalick; Wang, Danwei

doi:10.1007/s00170-015-8119-6

Cited by 52 publications

(22 citation statements)

References 87 publications

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“…Surface finishing techniques are commonly classified based on the type of energy sources used, including mechanical, chemical, electrical and electrochemical sources [59]. Here, surface finishing techniques are classified into contact and non-contact type techniques.…”

Section: Contact Surface Finishing Techniquesmentioning

confidence: 99%

Recent Progress in Precision Machining and Surface Finishing of Tungsten Carbide Hard Composite Coatings

Micallef

Zhuk²,

Aria

2020

Coatings

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Owing to their high hardness, fracture toughness and oxidation resistance, tungsten carbide (WC) coatings are extensively deposited on parts that operate in demanding applications, necessitating wear, erosion, and corrosion resistance. The application of thick and hard WC coatings has an inevitable effect on the original dimensions of the parts, affecting the geometrical tolerances and surface roughness. The capability of achieving a sub-micron surface finish and adhere to tight geometrical tolerances accurately and repeatably is an important requirement, particularly with components that operate in high-precision sliding motion. Meeting such requirements through conventional surface finishing methods, however, can be challenging due to the superior mechanical and tribological properties of WC coatings. A brief review into the synthesis techniques of cemented and binderless WC coatings is presented together with a comprehensive review into the available techniques which are used to surface finish WC-based coatings with reference to their fundamental mechanisms and capabilities to process parts with intricate and internal features. The binderless WC/W coating considered in this work is deposited through chemical vapour deposition (CVD) and unlike traditional cemented carbide coatings, it has a homogenous coating structure. This distinctive characteristic has the potential of eliminating key issues commonly encountered with machining and finishing of WC-based coatings. Here, six contact and non-contact surface finishing techniques, include diamond turning, precision grinding, superfinishing, vibratory polishing, electrical discharge machining, and electropolishing are discussed along with their current use in industry and limitations. Key challenges in the field are highlighted and potential directions for future investigation, particularly on binderless WC coatings, are proposed herein.

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Section: Contact Surface Finishing Techniquesmentioning

confidence: 99%

Recent Progress in Precision Machining and Surface Finishing of Tungsten Carbide Hard Composite Coatings

Micallef

Zhuk²,

Aria

2020

Coatings

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“…In addition, the polishing operation environment is noisy and dusty, which can easily cause occupational diseases and even personal injury. 1 Industrial robots have the advantages of low price, large working space, and strong flexibility. In order to solve the shortcomings of manual polishing and the advantages of applying industrial robots, the development of grinding and polishing robot systems and other types of automatic polishing equipment has received extensive attention.…”

Section: Introductionmentioning

confidence: 99%

A hybrid control strategy for grinding and polishing robot based on adaptive impedance control

Zhou

Wang

et al. 2021

Advances in Mechanical Engineering

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In order to realize the active and compliant motion of the robot, it is necessary to eliminate the impact caused by processing contact. A hybrid control strategy for grinding and polishing robot is proposed based on adaptive impedance control. Firstly, an electrically driven linear end effector is designed for the robot system. The macro and micro motions control model of the robot is established, by using impedance control method, which based on the contact model of the robot system and the environment. Secondly, the active compliance method is adopted to establish adaptive force control and position tracking control strategies under impact conditions. Finally, the algorithm is verified by Simulink simulation and experiment. The simulation results are as follows: The position tracking error does not exceed 0.009 m, and the steady-state error of the force is less than 1 N. The experimental results show that the motion curve coincides with the surface morphology of the workpiece, and the contact force is stable at 10 ± 3 N. The algorithm can realize more accurate position tracking and force tracking, and provide a reference for the grinding and polishing robot to realize surface processing.

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“…With remarkable positioning accuracy and force control performance, CNC machines are widely used for the polishing of various types of workpieces [7]. However, these machines frequently require special fixtures and techniques for the machining of complex shaped workpieces, and the limited available working space usually limits the size of the workpiece [8].…”

Section: Introductionmentioning

confidence: 99%

A Novel Force-Controlled Spherical Polishing Tool Combined With Self-Rotation and Co-Rotation Motion

Huang

Wan

et al. 2020

IEEE Access

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In order to improve the polishing efficiency and aim at the problem that the positioning error of industrial robot will cause the fluctuation of polishing force and the instability of removal function, a novel force-controlled spherical polishing tool combined with self-rotation and co-rotation motion for automatic polishing process is presented. The spherical polishing tool, which is integrated into the end of arm of an industrial robot for workpiece profile polishing has a linear voice coil motor to provide compliance and polishing force in the polishing process. The fluctuation of the polishing force caused by the positioning error of the robot can be effectively reduced, and a stable symmetric Gaussian removal function can be obtained by optimizing the ratio of co-rotation to self-rotation speed of the end-effector. The main advantage of the polishing method is that the polishing force can be actively controlled according to the pre-planned polishing requirements. By measuring the responsiveness and the stability of the polishing force using the proposed end-effector, it is verified that the polishing method can better adapt to the fluctuation of the polishing force and has a good performance in achieving remarkable polishing force tracking. The effectiveness of the proposed polishing method in ensuring the stability of removal function and surface convergence efficiency is verified through polishing experiments. The robotic flexible polishing method has great application prospect in processing large-sized optical components. It significantly improves the precision of polishing force and the surface convergence efficiency of the workpiece. INDEX TERMS Polishing force, robotic flexible polishing, removal function, spherical polishing tool.

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Electrochemical mechanical polishing technology: recent developments and future research and industrial needs

Cited by 52 publications

References 87 publications

Recent Progress in Precision Machining and Surface Finishing of Tungsten Carbide Hard Composite Coatings

Recent Progress in Precision Machining and Surface Finishing of Tungsten Carbide Hard Composite Coatings

A hybrid control strategy for grinding and polishing robot based on adaptive impedance control

A Novel Force-Controlled Spherical Polishing Tool Combined With Self-Rotation and Co-Rotation Motion

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