Liquid source misted chemical deposition was used to fabricate LiMn 2 O 4 film as a cathode for lithium rechargeable microbatteries. The effect of crystallization temperature on the film properties was investigated by X-ray diffraction (XRD), Raman spectroscopy (RS), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), cyclic voltammetry (CV), and charge/discharge experiments. When the heat treatment for crystallization of the as-deposited film was carried out at 800 C in a rapid thermal apparatus (RTA) in an oxygen atmosphere for 5 min, the structural and compositional purity, and the electrochemical activity of the deposited film, were optimized. The LiMn 2 O 4 films prepared by this method exhibited much better electrochemical rechargeability than those deposited by other techniques, such as sputtering, laser ablation, sol± gel coating, etc. The prepared film exhibits an initial discharge capacity of 62.5 lA h cm ±2 lm ±1 and a low capacity fade of 8.0 % over 100 cycles.