Electro Thermal and Electro Statical Actuation of a Surface Micromachined Tunable Fabry-Pérot Filter

Gierl, Christian; Zogal, Karolina; Davani, H. A.; Meißner, P.

doi:10.1364/cleo_at.2011.jtui73

Cited by 2 publications

(3 citation statements)

References 2 publications

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“…The presented technology is based on low temperature plasma enhanced chemical vapor deposition and is not restricted to 1550 nm only. Hence it is applicable for tunable VCSELs, receivers or filters [11,12] operating at different highly desirable wavelengths from 0.8 µm to 2.7 µm. For the realization of widely tunable VCSELs, the top mirror of a fixed wavelength VCSEL [13] is replaced by a MEMS movable reflector enabling a change of the optical cavity length, and hence wavelength tuning.…”

Section: Introductionmentioning

confidence: 99%

Surface micromachined tunable 155 μm-VCSEL with 102 nm continuous single-mode tuning

et al. 2011

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For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102 nm in the range of 1550 nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5 mW and is > 2 mW over the entire tuning range. The sidemode suppression ratios are > 45 dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with surface micro-machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).

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Section: Introductionmentioning

confidence: 99%

Surface micromachined tunable 155 μm-VCSEL with 102 nm continuous single-mode tuning

et al. 2011

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“…The stepwise change in the material composition from pure InAs to Al 48.0 Ga 44.3 In 50. 9 As reduces the accumulated strain by 40 % compared to the sharp step between two material compositions only, as it is the case for the REC-QWs. More details about the QWs design can be found in.…”

Section: Half-vcselmentioning

confidence: 88%

“…The barriers consist of Al 48.0 Ga 44.3 In 50. 9 As with a thickness of 10 nm. The stepwise change in the material composition from pure InAs to Al 48.0 Ga 44.3 In 50.…”

Section: Half-vcselmentioning

confidence: 99%

Widely tunable singlemode surface micro-machined MEMS-VCSELs operating at 1.95-μm

et al. 2013

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We present surface micro-machined micro-electro mechanical-system (MEMS) tunable vertical-cavity surfaceemitting lasers (VCSEL) with rectangular and triangular shaped quantum wells (QWs) emitting around 1.95 µm predestined for broadband tunable diode laser absorption spectroscopy. The VCSELs show single-mode operation and high side-mode suppression-ratio SMSR > 50 dB within the whole tuning range of 50 nm and 35 nm, the fibre-coupled optical power of 1.0 mW and 1.76 mW and the threshold current of 2.5 mA and 2.0 mA for the rectangular and triangular shaped QWs respectively. The 3 dB modulation frequency of the MEMS is 110 Hz.

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Electro Thermal and Electro Statical Actuation of a Surface Micromachined Tunable Fabry-Pérot Filter

Cited by 2 publications

References 2 publications

Surface micromachined tunable 155 μm-VCSEL with 102 nm continuous single-mode tuning

Surface micromachined tunable 155 μm-VCSEL with 102 nm continuous single-mode tuning

Widely tunable singlemode surface micro-machined MEMS-VCSELs operating at 1.95-μm

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