Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection

Mafi, Elham; Calvano, Nicholas; Patel, Jessica; Islam, Md. Sherajul; Khan, Md. Sakib Hasan; Rana, Mukti M.

doi:10.3390/mi11121073

Cited by 4 publications

(5 citation statements)

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“…Modified PT materials have shown interesting piezoelectric [ 15 ] and pyro-electric properties. Preparation and characterization of many modified versions of PT films including Calcium (Ca) or Calcium Lead Titanate (PCT) [ 16 ], Lanthanum (La)-modified PT (PLT) [ 17 ], and La modified Lead Zirconate Titanate (PLZT) [ 18 ] has been reported. Magnetron sputter deposition has also been used to synthesize layered perovskite films.…”

Section: Methodsmentioning

confidence: 99%

“…Any increase in the oxidation rate of the Pb adatoms during film growth reduces the re-evaporation rate of the Pb adatoms. According to Schlom et al [67] the amount of the Pb re-evaporation diminishes when the gas mixture includes highly oxidizing gas(es) such as ozone and/or N 2 O. E. Mafi et al [16] reported on the preparation and characterization of crack-free PCT thin films with smooth surfaces for use in pyroelectric detectors. PCT films were deposited on both silicon and Si/SiN/Ti/Au substrates at 13 mTorr pressure of a gascontaining mixture of Ar 2 and O 2 using a 200 W-RF sputtering source for four hours at 550 • C < Ts < 800 • C. The PCT films were then annealed at Tpan = 550, 600, 650 and 700 • C in O 2 environment for small time intervals of 15 min.…”

Section: Growth Dimension Depletive Nucleation Constant Nucleationmentioning

confidence: 99%

“…E. Mafi et al [ 16 ] reported on the preparation and characterization of crack-free PCT thin films with smooth surfaces for use in pyroelectric detectors. PCT films were deposited on both silicon and Si/SiN/Ti/Au substrates at 13 mTorr pressure of a gas-containing mixture of

and

using a 200 W-RF sputtering source for four hours at

.…”

Section: Epitaxial Growth Of Lead Titanates By Magnetron Sputteringmentioning

confidence: 99%

“… ( a , b ) show the XRD data of PCT thin films deposited on Si and Si/SiN/Ti/Au substrates before and after annealing, respectively [ 16 ]. “Mafi, E.; Calvano, N.; Patel, J.; Islam, M. S.; Hasan Khan, M. S.; Rana, M. (2020).…”

Section: Figurementioning

confidence: 99%

“… An SEM micrograph showing crystal growth PCT thin film annealed at 600 °C [ 16 ]. “Mafi, E.; Calvano, N.; Patel, J.; Islam, M. S.; Hasan Khan, M. S.; Rana, M. (2020).…”

Section: Figurementioning

confidence: 99%

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Magnetron Sputtered Lead Titanates Thin Films for Pyroelectric Applications: Part 1: Epitaxial Growth, Material Characterization

Fathipour,

Xu,

Rana

2023

Materials

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Pyroelectric materials, are those materials with the property that in the absence of any externally applied electric field, develop a built-in spontaneous polarization in their unit cell structure. They are regarded as ideal detector elements for infrared applications because they can provide fast response time and uniform sensitivity at room temperature over all wavelengths. Crystals of the perovskite Lead Titanate (PbTiO3) family show pyroelectric characteristics and undergo structural phase transitions. They have a high Curie temperature (the temperature at which the material changes from the ferroelectric (polar) to the paraelectric (nonpolar) phase), high pyroelectric coefficient, high spontaneous polarization, low dielectric constant, and constitute important component materials not only useful for infrared detection, but also with vast applications in electronic, optic, and Micro-electromechanical systems (MEMS) devices. However, the preparation of large perfect, and pure single crystals of PbTiO3 is challenging. Additionally, difficulties arise in the application of such bulk crystals in terms of connection to processing circuits, large size, and high voltages required for their operation. A number of thin film fabrication techniques have been proposed to overcome these inadequacies, among which, magnetron sputtering has demonstrated many potentials. By addressing these aspects, the review article aims to contribute to the understanding of the challenges in the field of pyroelectric materials, highlight potential solutions, and showcase the advancements and potentials of pyroelectric perovskite series including PbZrTiO3 (PZT), PbxCa1−x (PZN-PT), etc. for which PbTiO3 is the end member. The review is presented in two parts. Part 1 focuses on material aspects, including preparation methods using magnetron sputtering and material characterization. We take a tutorial approach to discuss the progress made in epitaxial growth of lead titanate-based ceramics prepared by magnetron sputtering and examine how processing conditions may affect the crystalline quality of the growing film by linking to the properties of the substrate/buffer layer, growth substrate temperature, and the oxygen partial pressure in the gas mixture. Careful control and optimization of these parameters are crucial for achieving high-quality thin films with desired structural and morphological characteristics.

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Section: Methodsmentioning

confidence: 99%

Section: Growth Dimension Depletive Nucleation Constant Nucleationmentioning

confidence: 99%

and

using a 200 W-RF sputtering source for four hours at

.…”

Section: Epitaxial Growth Of Lead Titanates By Magnetron Sputteringmentioning

confidence: 99%

Section: Figurementioning

confidence: 99%

“… An SEM micrograph showing crystal growth PCT thin film annealed at 600 °C [ 16 ]. “Mafi, E.; Calvano, N.; Patel, J.; Islam, M. S.; Hasan Khan, M. S.; Rana, M. (2020).…”

Section: Figurementioning

confidence: 99%

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