2014
DOI: 10.1364/oe.22.005252
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Electro-optic light modulation and THz generation in locally plasma-activated silicon nanophotonic devices

Abstract: Silicon is not an electro-optic material by itself but the required second-order optical nonlinearity can be induced by breaking the inversion symmetry of the crystal lattice. Recently, an attractive approach has been demonstrated based on a surface-activation in a CMOS-compatible HBr dry etching process. In this work, we further investigate and quantify the second-order nonlinearity induced by this process. Using THz near-field probing we demonstrate that this simple and versatile process can be applied to lo… Show more

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Cited by 9 publications
(6 citation statements)
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“…Further work [52] has shown that effective χ (2) increases with the reduction of the waveguide dimensions, which can also be explained by the increased mode penetration into the silicon nitride cladding. It was further shown in [53] that the nonlinearity can be activated by the formation of Si-Br bonds during an HBr dry etching process, and we predict a similar effect for SiN bonds. Finally, the fact that χ (2) has been observed in SiN waveguides that are naturally strained [19][20][21][22][23] also serves to confirm our explication.…”
Section: Discussionsupporting
confidence: 75%
“…Further work [52] has shown that effective χ (2) increases with the reduction of the waveguide dimensions, which can also be explained by the increased mode penetration into the silicon nitride cladding. It was further shown in [53] that the nonlinearity can be activated by the formation of Si-Br bonds during an HBr dry etching process, and we predict a similar effect for SiN bonds. Finally, the fact that χ (2) has been observed in SiN waveguides that are naturally strained [19][20][21][22][23] also serves to confirm our explication.…”
Section: Discussionsupporting
confidence: 75%
“…The nonlinear susceptibility of graphene [4] is both strong-per atom it is orders of magnitude higher than that of common gapped semiconductors and metals-and controllable by the chemical potential [5,6], which can be tuned by an external gate voltage [7,8] or chemical doping [9]. With the possibilities it offers for integration in siliconbased optical integrated circuits, graphene is an exciting new candidate for enhancing nonlinear optical functionalities in silicon-based on-chip optical devices, such as on-chip broadband light sources, electro-optic modulators [10,11], optical switches [12][13][14], and optical transistors [15,16]. In realizing some of these devices [14], the presence of second-order optical nonlinearities, especially second harmonic generation (SHG), is a key requirement.…”
Section: Introductionmentioning
confidence: 99%
“…In the development of integrated graphene-based photonic devices, the presence of a second order nonlinearity is important for realizing various essential building blocks, such as fast and compact electro-optic modulators [20,21], optical switches [22][23][24], and optical transistors [25,26]. In many of these device implementations the second-order process being exploited is second harmonic generation (SHG).…”
Section: Introductionmentioning
confidence: 99%