“…Microstructural and physical characteristics of PS, such as thickness, bulk porosity and specific area of the surface, pore size distribution, dielectric permittivity and index of refraction, depend directly on the production conditions, e.g. on the electrolyte composition, anodizing current density, duration of etching and outer illumination [1,[9][10][11]. In addition, the PS layer parameters depend on the properties of the silicon bulk material-its conductivity type, doping level and orientation of crystals.…”