Electrically-functionalised nanoindenter dedicated to local capacitive measurements: Experimental set-up and data-processing procedure for quantitative analysis

Evidence of Plasticity‐Driven Conductivity Drop in an Ultra‐Low‐k Dielectric Organosilicate Glass

“…[46,[56][57][58]35] In the present work, a nanoporous SiOCH film deposited on silicon substrate was nanoindented with a home-developed device able to monitor simultaneously and continuously both the electrical and mechanical responses of the film during indentation. [59][60][61] Nanoindentation is a well-established technique dedicated to the local mechanical testing of materials at nanoscales, [62,63] and is well suited for thin film characterizations. [64,65] The coupling of this technique with electrical measurements allows the analysis of the mechanical and electrical behaviors of thin film materials as well as their interaction.…”

Resistive-nanoindentation on gold: Experiments and modeling of the electrical contact resistance

“…In the last decade, numerous efforts have been made to expand the capabilities of this technique [5]: SEM imaging [6], high temperature testing [7], electrochemical nanoindentation [8], multi-field nanoindentation [9],… The coupling of indentation with electrical measurements was first initiated with large-scale indenters (macro-and micro-indentation) and finally extended to nanoindentation. This coupling was driven by a wide spectrum of motivations such as the local monitoring of phase transformation [10][11][12][13][14][15][16], the study of native oxide fractures [17][18][19], the characterization of piezoelectric materials [20,21], the characterization of particles dedicated to packaging [22], the investigation of MEMS operation [23,24], the monitoring of thin film dielectric behaviors [25,26] and the contact area computation during nanoindentation tests [27][28][29][30][31][32]. The latest point is of particular interest for the quantitative analysis of raw nanoindentation measurements since the contact area 𝐴 𝑐 is the missing experimental data necessary for the extraction of both sample hardness and Young's modulus.…”

Development of a multifunctional nanoindenter integrated in-situ Scanning Electron Microscope - application to the monitoring of piezoresponse and electro-mechanical failures

“…Numerous developments have been made to expand the capabilities of this technique [3]: real-time imaging in Scanning Electron Microscopes (SEM) [4][5] or in Transmission Electron Microscopes (TEM) [6][7][8], high temperature nanoindentation [9][10][11], coupling with electrochemical analysis [12], coupling with electrical measurements,... The latter development (usually referred to as 'nano-ECR' or 'resistive-nanoindentation') was driven by a wide spectrum of motivations such as the local monitoring of phase transformation [13][14][15][16][17][18][19], the study of native oxide fractures [20][21][22], the characterization of piezoelectric materials [23][24], the investigation of microsystem operation [25], the monitoring of dielectric film behaviors [26][27] and the contact area computation during nanoindentation tests [28][29][30][31][32][33].…”

“…Beyond the instrumental development, a challenging step of this electro-mechanical coupling remains the quantitative processing of raw data [26,30,34,35]. As already stated, the real-time imaging of nanoindentation tests has been widely reported, but only few attempts have been 5 made to combine electrical measurements and real-time observations in-situ SEM: for the electro-mechanical characterization of graphene in a dedicated device (nanoindenter was then used for mechanical actuation only) [36], for post-mortem observations of indentation imprints [37] or for the local characterization of multi-phased alloys [38].…”