Electrical properties of ZnO:H films fabricated by RF sputtering deposition and fabrication of p-NiO/n-ZnO heterojunction devices

Abstract

A high-transparency ZnO thin film of high carrier concentration was grown by conventional RF sputtering, where the carrier concentration was continuously varied from 10 16 to 10 19 cm %3 by controlling the amounts of O 2 and H 2 sputtering gases. To prevent the formation of a Schottky junction at the contact with In-Zn-O, and to improve the fill factor of a visible-light-transparent solar cell, a Ag-paste/NiO/ZnO/ZnO:H/IZO p-n diode structure with the carrier concentration of the ZnO:H layer of 10 19 cm %3 was fabricated. It is possible to reduce the depletion width and inverse the rectification action around ZnO/IZO by controlling the carrier concentration of the ZnO layer while maintaining the high transparency.

Polycrystalline SnO2 Visible‐Light‐Transparent CO2 Sensor Integrated with NiO/ZnO Solar Cell for Self‐Powered Devices

“…It is noted that the V OC and J SC of only the NiO/ ZnO solar cell without the sensor and insulating layers were 0.49 V and 57 μA cm À2 , respectively. [25] The V OC and J SC of the integrated self-powered device were lower than those of only the solar cell layer. As the CO 2 sensor layer and insulating layer were deposited on the solar cell layer, the amount of UV light absorbed by the solar cell layer decreased.…”

“…The open‐circuit voltage ( V OC ) was 0.16 V, and the short‐circuit current density ( J SC ) was 1.04 nA cm −2 . It is noted that the V OC and J SC of only the NiO/ZnO solar cell without the sensor and insulating layers were 0.49 V and 57 μA cm −2 , respectively . The V OC and J SC of the integrated self‐powered device were lower than those of only the solar cell layer.…”

“…The sensor and the solar cell are separated by an insulator and connected to each other via an Au electrode. The solar cell layer comprising NiO:Li, ZnO, ZnO:H, and ITiO layers was deposited on alkali‐free glass substrates, as shown in Figure (a), by reactive RF magnetron sputtering without intentional heating. After setting the background pressure to 2 × 10 −3 Pa, Ar and O 2 (or H 2 ) gases were used as the sputtering and assist source gases, respectively.…”

“…The sensor is visible‐light transparent, and the optical transmittance in the visible region is over 70%. In addition, NiO‐based visible‐light‐transparent solar cells have been fabricated for installation on walls or ceilings of buildings and greenhouses . To improve the fill factor of a visible‐light‐transparent solar cell, an Ag‐paste/NiO/ZnO/ZnO:H/InZnO p–n diode structure with a ZnO:H layer carrier concentration of 10 19 cm −3 was fabricated.…”

“…In addition, NiO-based visible-light-transparent solar cells have been fabricated for installation on walls or ceilings of buildings and greenhouses. [25] To improve the fill factor of a visible-light-transparent solar cell, an Agpaste/NiO/ZnO/ZnO:H/InZnO p-n diode structure with a ZnO:H layer carrier concentration of 10 19 cm À3 was fabricated. The optical transmittance in the visible region was found to be over 80%.…”