Electrical properties of TiO₂ films synthetized by sol-gel process

Abstract

Titanium oxide (TiO2) is one of the most used metal oxides for its multiple applications due to its high sensitivity, fast response, low cost, no toxicity and used in hostile environments. In this work was deposited TiO2 film on 304 stainless steel substrates using the spin coating technique. The synthesis of the deposited solution was with the sol-gel method a temperature environment, obtained TiO2 films on different thermal treatments. The results of the experiment show film: with a thickness from 0.6 to 1μm, anatase phase at the plane (101). The Raman spectroscopy confirms the TiO2 anatase phase. The resistivity decreases, and conductivity increases with increasing temperature. The micrograph SEM observes a compact and smooth homogeneous surface with an average size of 18.40nm to 7nm.