Electrical properties of SBT capacitor with top electrodes

Abstract

The A Sr0.7BiZ.6Taz09(SBT) thin films are deposited on Pt-coated electrode(PtlTiOz/SiO2/Si) using RF magnetron sputtering method. The electrical properties of SBT capacitors with top electrodes were studied. In the XRD pattem, the SBT thin films in all annealing temperatures had (105) orientation. In the SEM images, Bi-layered perovskite phase was crystallized at 750°C and grains largely grew in oxygen annealing atmosphere. The electrical properties of SBT capacitor with top electrodes represents a favorable properties in Pt electrode. The maximum remanent polarization and the coercive electric field with Pt electrode are 12.40~C/cmz and 30kVkm respectively.The dielectric constant and leakage current density with Pt electrode is 340 and 6 . 8 1~1 0~'~ NcmZ respectively. key word : SBT thin films, sputtering, leakage current