Electrical probe calibration and power calculation for a miniature 13.56 MHz plasma source

Léveillé, Valérie; Coulombe, Sylvain

doi:10.1088/0957-0233/17/11/023

Cited by 10 publications

(6 citation statements)

References 17 publications

(31 reference statements)

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“…This causes the reactive power in the system to become higher than based on the electrical model of the plasma alone. Error margins of ±42% [17] for the calculated power have been reported in previous studies.…”

Section: Introductionsupporting

confidence: 77%

Multiplying probe for accurate power measurements on an RF driven atmospheric pressure plasma jet applied to the COST reference microplasma jet

Beijer

Sobota

Veldhuizen

et al. 2016

J. Phys. D: Appl. Phys.

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Section: Introductionsupporting

confidence: 77%

Multiplying probe for accurate power measurements on an RF driven atmospheric pressure plasma jet applied to the COST reference microplasma jet

Beijer

Sobota

Veldhuizen

et al. 2016

J. Phys. D: Appl. Phys.

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“…Three different methods were successfully used, each leading to comparable phase shift compensations of 17° ± 1°. The first method is described in Reference and allows for the calculation of the phase shift starting from current and voltage probe equivalent impedances. The other two methods are experimental ones and consist in the measurement of voltage and current when supplying a known load.…”

Section: Methodsmentioning

confidence: 99%

Characterization of a plasma source for biomedical applications by electrical, optical, and chemical measurements

Neretti

Tampieri

Borghi

et al. 2018

Plasma Processes & Polymers

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This paper reports the characterization of a low‐power, atmospheric pressure plasma source developed for and successfully tested in applications of plasma medicine. The source produces plasma by ionizing a helium flow containing traces of air. The effluent gas is thus enriched in reactive oxygen and nitrogen species as well as helium metastable excited states. Electrical measurements, Schlieren imaging, OES and various chemical analyses and probes enabled us to fully characterize the plasma source and to determine some fundamental parameters for treating living samples such as the power feeding the discharge, the optimal source to target distance, the maximum exposure time, and to identify the major chemical species responsible for the biological action on exposed living matter.

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“…power dissipated only in the plasma the delay induced by the voltage and current probes and the oscilloscope have to be corrected [34], as well as the power dissipated inside the matchbox. Details can be found in reference [32].…”

Section: Power and Phase Shift Measurementsmentioning

confidence: 99%

Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates

et al. 2014

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Cold atmospheric pressure plasma jets are often used as a remote plasma source for substrate treatments. However, this substrate acts as an electrode and this additional electrode can induce effects on plasma parameters such as the dissipated power, gas temperature, etc. In this work the influence of substrates of different conductivity and permittivity in direct contact with three different operational modes of atmospheric pressure RF plasma jets is investigated. Two different electrode configurations (creating either a linear or a cross electric field) and, for the linear field configuration, two voltage modulations (continuous RF and kHz pulsed RF) have been studied. Electrical and optical diagnostic methods have been performed in order to get quantitative data of the change in plasma dissipated power and gas temperature, when the plasma is in direct contact with the substrate. In all three investigated cases the power dissipation and gas temperature, significantly increase when the plasma is in direct contact with a conductive substrate. The increase of power is attributed to a change of the equivalent electrical circuit, leading to a more favourable matching between the power input and the plasma source.

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Electrical probe calibration and power calculation for a miniature 13.56 MHz plasma source

Cited by 10 publications

References 17 publications

Multiplying probe for accurate power measurements on an RF driven atmospheric pressure plasma jet applied to the COST reference microplasma jet

Multiplying probe for accurate power measurements on an RF driven atmospheric pressure plasma jet applied to the COST reference microplasma jet

Characterization of a plasma source for biomedical applications by electrical, optical, and chemical measurements

Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates

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