Efficient modeling of power supply noises is crucial for a robust power supply design, especially with increase in the size of on-chip power grids due to emerging 3D chip integration technology. As the power grid is interconnected vertically by through-silicon vias (TSVs), operational currents required by each functional device in integrated circuits (ICs) are supplied through vertical power and ground TSVs, and horizontal power grids. Fast switching speed of the devices become complicated the accurate analysis of the worst case power supply noises. In this paper, a systematic modeling of on-chip power grids with decoupling capacitors -VNCAPsused in TSV-based chip integration technology is presented using novel equivalent decap circuit model. The equivalent circuit model will be numerically validated and integrated into an efficient modeling for impedance profile of on-chip power grids and analysis of power supply noises in TSV-based 3D chip integration technology.
IntroductionWith emerging 3D chip integration technology for integrated circuits (ICs) and systems into small form factor, lower power consumption and high band-width, and rising the functional density and lowering the noise margins, power integrity becomes a limiting factor for the performance of the devices [1]. Reduced supply voltages and increased current demands have resulted in stringent constraints on a robust power supply design for the 3D ICs [2]. The power supply voltage should be reliable distributed in order for the devices to function properly. Operation voltage V dd for the device is decreasing with new emerging technology node, while the required current is increasing with the increase in integration functional density [3]. The overall supply voltage across the load fluctuates because of the voltage drops resulted from the resistive and inductive nature of the power grid in the 3D ICs and the current demand of the local load devices. Estimating and analyzing these voltage drops, which plays a crucial role in the design and test of integrated circuits, is challenging because of increased complexity of on-chip interconnects.Power and ground distribution networks for 3-D integrated circuits contain millions of interconnects or nodes. Since the power and ground networks are considered as linear network, the formulation of the analysis modeling should be straight forward. However, solving the linear system of the network is computationally intensive due to the large grid size. Suppose the power distribution network has N rows and N columns in grid, the resulting resistance matrix to solve the linear system of the network is N 2 x N 2 . The size of the resistance matrix will increase in quadratic when increasing the power grid size. Conventional linear solvers are computationally inefficient to solve the system due to the large size of the power distribution network.