2011 IEEE 20th Conference on Electrical Performance of Electronic Packaging and Systems 2011
DOI: 10.1109/epeps.2011.6100179
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Electrical performance of vertical natural capacitor for RF system-on-chip in 32-nm technology

Abstract: Radio frequency system-on-chips (RF SoC) require high quality passive devices such as capacitors. We comprehensively studied the vertical natural capacitors (VNCAP) made of CMOS back-end-of-lines (BEOL) in 32-nm technology. We used electromagnetic simulation and a Pi-type equivalent circuit model for the study of the VNCAP, and reported its electrical characteristics including the scattering parameter, effective capacitance, self-resonant frequency and quality factor up to 20 GHz. We also briefly discussed the… Show more

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Cited by 4 publications
(3 citation statements)
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References 7 publications
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“…5, a uniform power grid on through-silicon interposer just beneath the chip with a metal layer distribution of w = 10 m, t = 2 m and a pitch of 20 m is presented to demonstrate the accuracy if the proposed modelling method. One voltage source connected at (6,6) and three current loads connected at (4,6), (6,2) and (8,4) are applied to the power grid. The wire resistance between two adjacent nodes in the power grid is computed as 17.2 m from wire geometry.…”
Section: Numerical Examplesmentioning
confidence: 99%
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“…5, a uniform power grid on through-silicon interposer just beneath the chip with a metal layer distribution of w = 10 m, t = 2 m and a pitch of 20 m is presented to demonstrate the accuracy if the proposed modelling method. One voltage source connected at (6,6) and three current loads connected at (4,6), (6,2) and (8,4) are applied to the power grid. The wire resistance between two adjacent nodes in the power grid is computed as 17.2 m from wire geometry.…”
Section: Numerical Examplesmentioning
confidence: 99%
“…The resistance between two adjacent nodes is computed as 17.2 m . One voltage source connected at (6,6) and three current loads connected at (4,6), (6,2) and (8,4) are applied to the power grid. The voltage source is set to 1 V and each dc current load sinks at 100 mA.…”
Section: Numerical Examplesmentioning
confidence: 99%
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