Electrical, optical, and structural properties of ITO co-sputtered IZO films by dual target magnetron sputtering

Jeong, Jin-A; Choi, Kwang-Hyuk; Bae, Jung-Hyeok; Moon, Jong‐Min; Jeong, Soon Wook; Kim, In-Soo; Kim, Han−Ki; Yi, Min-Su

doi:10.1007/s10832-008-9468-4

Cited by 6 publications

(3 citation statements)

References 15 publications

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“…Many groups have reported the influence on ZnO thin films of metal dopants, including In [10], Al [11][12][13][14], Fe [12,15], Mn [16], Mg [17], and Ga [12,18], to replace indium-doped tin oxide or fluorine-doped tin oxide [1,3]. One promising dopant is Cu, which has been reported to show enhanced properties such as higher conductivity [19], diluted magnetic properties [15], and improved crystal quality [20].…”

Section: Introductionmentioning

confidence: 99%

Tuning the Morphology and Properties of Nanostructured Cu-ZnO Thin Films Using a Two-Step Sputtering Technique

Lee

Jung

et al. 2020

Metals

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Zinc oxide (ZnO) is a wide-band-gap semiconductor that is promising for use as a transparent conductive oxide film. To date, to improve their optoelectrical properties, pristine ZnO films have been doped with metals using various techniques. In this study, nanostructured Cu-ZnO thin films were synthesized using a modified two-step radio frequency magnetron sputtering technique with separate ZnO and metallic Cu targets. Controlling the timing of the Cu/ZnO co-sputtering and ZnO-only sputtering steps afforded a significant change in the resulting nanostructures, such as uniform Cu-ZnO and broccoli-structured Cu-ZnO thin films. Using various measurement techniques, the influence of Cu doping was analyzed in detail. Furthermore, a crystal growth model for the formation of the broccoli-like clusters was suggested. The Cu-ZnO thin films synthesized using this technique demonstrate a highly improved conductivity with some loss in optical transmittance.

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Section: Introductionmentioning

confidence: 99%

Tuning the Morphology and Properties of Nanostructured Cu-ZnO Thin Films Using a Two-Step Sputtering Technique

Lee

Jung

et al. 2020

Metals

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“…The study found that Al doping increased the electrical conductivity of the ITO films due to the formation of oxygen vacancies, which enhanced the carrier concentration and mobility. However, the study also revealed that excessive Al doping could result in a decrease in the optical transmittance of the ITO films, which could limit their transparency for certain applications [12]. A study investigated the mechanical and electrical properties of ITO thin films on flexible substrates.…”

Section: Related Workmentioning

confidence: 99%

Mechanical and Electrical Properties for ITO (Thin Film) Coating PET

Alawnah,

Alkhatib,

AlZoubi

et al. 2024

Information Sci. Appl.

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This study focuses on applying ITO (Indium Tin Oxide) thin film as a PET (Polyethylene Terephthalate) coating in solar cells. While ITO thin films are already used in this field, their efficiency varies based on numerous factors, with the mechanical and electrical properties being the most influential. Understanding and optimizing these properties can significantly enhance the solar cell industry. To achieve this, we conducted film transmittance tests on the as-produced samples under various environmental conditions to investigate their material behavior. Additionally, mechanical and electrical experiments were carried out to analyze and compare these properties under different parameters, with the ultimate goal of improving the PET coating for solar cell applications. By studying and enhancing the performance of ITO thin films, we can contribute to advancements in solar cell technology.

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“…TCO films have been utilized in various optoelectronic applications due to their exceptional optical transmittance (>80%) in the visible wavelength range (380-700 nm) and favorable electrical properties (resistivity of <10 −4 Ω.cm). These applications include thin-film transistors, solar cells, organic light-emitting diodes (OLEDs), flat-panel displays, liquidcrystal displays, and plasma display panels [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16]. Various techniques such as pulsed laser deposition, thermal evaporation, chemical vapor deposition, electron-beam evaporation, sol-gel deposition, ion beam-assisted deposition, and magnetron sputtering are utilized for depositing TCO films [3,4,[17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Optical, Electrical and Structural Properties of ITO/IZO and IZO/ITO Multilayer Transparent Conductive Oxide Films Deposited via Radiofrequency Magnetron Sputtering

Seyhan,

Kartal

2023

Coatings

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In this study, we investigated the potential of multilayer TCO structures, specifically those made up of Indium Tin Oxide (ITO) and Indium Zinc Oxide (IZO), for crystalline silicon heterojunction solar cells (SHJ). We used the radiofrequency (RF) magnetron sputtering method to deposit various thin-film structures under various deposition temperatures and evaluated their electrical, optical, and morphological properties. The objective was to obtain films with lower sheet resistances and higher transmittances than those of single-layer thin films. Our results show that the ITO/IZO/ITO/IZO/ITO multilayer film structure deposited at 200 °C achieves the best sheet resistance of 18.5 Ohm/sq and a high optical transmittance of over 90% at a 550 nm wavelength. This indicates that multilayer TCO structures have the potential to be more optically and electrically efficient, and that they can improve the performance of optoelectronic devices. Finally, a power conversion efficiency of 17.46% was obtained for a silicon heterojunction (SHJ) solar cell fabricated using an ITO/IZO/ITO/IZO/ITO multilayer film structure deposited at 200 °C as a front TCO. Our study provides valuable insights into the field of TCOs and offers a promising avenue for future research.

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Electrical, optical, and structural properties of ITO co-sputtered IZO films by dual target magnetron sputtering

Cited by 6 publications

References 15 publications

Tuning the Morphology and Properties of Nanostructured Cu-ZnO Thin Films Using a Two-Step Sputtering Technique

Tuning the Morphology and Properties of Nanostructured Cu-ZnO Thin Films Using a Two-Step Sputtering Technique

Mechanical and Electrical Properties for ITO (Thin Film) Coating PET

Optical, Electrical and Structural Properties of ITO/IZO and IZO/ITO Multilayer Transparent Conductive Oxide Films Deposited via Radiofrequency Magnetron Sputtering

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