Electrical manipulation of a single electron spin in CMOS using a micromagnet and spin-valley coupling
Bernhard Klemt,
Victor Elhomsy,
Martin Nurizzo
et al.
Abstract:For semiconductor spin qubits, complementary-metal-oxide-semiconductor (CMOS) technology is a promising candidate for reliable and scalable fabrication. Making the direct leap from academic fabrication to qubits fully fabricated by industrial CMOS standards is difficult without intermediate solutions. With a flexible back-end-of-line (BEOL), functionalities such as micromagnets or superconducting circuits can be added in a post-CMOS process to study the physics of these devices or achieve proofs-of-concept. On… Show more
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