Electrical contacts to nanocrystalline diamond films studied at high temperatures

Shimoda, Naotaka; Kato, Yoshimine; Teii, Kungen

doi:10.1063/1.4971960

Cited by 8 publications

(3 citation statements)

References 17 publications

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“…Such a variation of E a with temperature has also been observed for metal contacts to nanocrystalline diamond films. 38 The E a for ρ C is higher than that for R C . The difference in E a between R C and ρ C could be due to some dependence of L T upon temperature.…”

Section: Resultsmentioning

confidence: 87%

Electrical Characteristics of Metal Contacts to Carbon Nanowalls

Sun

Cho

Huang

et al. 2022

ECS J. Solid State Sci. Technol.

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The electrical characteristics of metal contacts to vertically-aligned nanographite structures, the so-called carbon nanowalls (CNWs), are examined using nickel as the electrode material. The total resistance between a pair of electrodes on CNWs is regarded as the sum of the serial resistance of CNWs and two metal-CNWs contacts to measure the contact resistance and specific contact resistivity by the transmission line method and transfer line method, respectively. The contact resistance and resistivity are around 2.8 Ω and 0.1 Ω cm2, respectively, at room temperature and decrease gently to 2.4 Ω and 0.06 Ω cm2, respectively, when the temperature is increased up to 300 °C. The apparent activation energy corresponding to the conduction barrier at the contact is in the range of 10−3 eV to 10−2 eV, which is comparable with that for the sheet resistance of CNWs. The contact resistance occupies a large portion of the total resistance between a pair of electrodes even at high temperatures, thus affecting electrical signal measurement in electronic and electrochemical device applications.

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Section: Resultsmentioning

confidence: 87%

Electrical Characteristics of Metal Contacts to Carbon Nanowalls

Sun

Cho

Huang

et al. 2022

ECS J. Solid State Sci. Technol.

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“…3(c)], while the tip diameter is smaller due presumably to evaporation of Au during etching. Because Au has a large work function (∼5.4 eV) compared to 4.5 eV typical of an NCD film, 9,[25][26][27] process (IV) was done for removal of Au. In Figs.…”

Section: Resultsmentioning

confidence: 99%

Formation of nanocrystalline diamond cones by reactive ion etching in microwave plasma for enhancing field emission

Ota¹,

Kato²,

Teii³

2018

Jpn. J. Appl. Phys.

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Cone-like nanostructures are formed on nitrogen-incorporated nanocrystalline diamond films by reactive ion etching (RIE) in a moderate-pressure microwave plasma. A thin Au layer is deposited on the film and followed by heating for transformation of an Au layer into Au nanoparticles as the mask for RIE. The diameter and spacing of Au nanoparticles depend upon the heating temperature and the thickness of Au. The smooth film surface is transformed into a number of cone-like protrusions with diameters, heights, and spacings of tens to a few hundreds of nm by RIE in a hydrogen/argon plasma and removal of Au residue in aqua regia. The formation of sharp nanostructures enhances field emission characteristics, so that the current density at high fields is increased largely up to the order of 10 −3 A cm −2 and the turn-on field is reduced down to around

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“…9 NCD films can emit electrons at low electric fields owing to a number of defect levels near the Fermi level in the bandgap, such as dangling bond, π, and π * states introduced by amorphous carbon phase at grain boundaries. 10 This effect is enhanced when nitrogen is incorporated into the film to create n-type conduction because of introduction of nitrogenrelated defect levels [11][12][13] and thus favorable for increasing emission performance. [14][15][16] For the application of field emission sources to ion engine and tether propulsion for operation in low earth orbits at altitudes of several hundred kilometers, one of the potential problems of carbonbased materials is a low resistance to oxidation.…”

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confidence: 99%

Field Emission Characteristics of Metal-Coated Nanocrystalline Diamond Films

Ota

Kaneko

Terada

et al. 2018

ECS J. Solid State Sci. Technol.

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Effect of thin metal coatings in nanoscale on field emission characteristics of nitrogen-incorporated nanocrystalline diamond films is examined with different metal species and thicknesses. The films show minimal change in surface morphology by coating a thin layer of Ag, Au, and In and consist of fine grains with sizes ranging from 10 to 20 nm depending upon the metal species and thickness. While the emission turn-on field is increased slightly to 3.6 Vμm −1 with very small thicknesses of the metals, it is decreased toward 2.5 Vμm −1 typical of a non-coated film with increasing thickness of the metals up to a few nm. The field enhancement factor related to the surface morphology of the films gives stronger effects on emission performance than the effective barrier height related to the work function of the metals. The Ag-coated film shows higher emission current stability than the non-coated film for duration up to 13 h.

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Electrical contacts to nanocrystalline diamond films studied at high temperatures

Cited by 8 publications

References 17 publications

Electrical Characteristics of Metal Contacts to Carbon Nanowalls

Electrical Characteristics of Metal Contacts to Carbon Nanowalls

Formation of nanocrystalline diamond cones by reactive ion etching in microwave plasma for enhancing field emission

Field Emission Characteristics of Metal-Coated Nanocrystalline Diamond Films

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