1972
DOI: 10.1063/1.1661788
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Electrical conductivity of heavily doped diamond

Abstract: Electrical characterization of Al/Si ohmic contacts to heavily boron doped polycrystalline diamond films

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Cited by 16 publications
(6 citation statements)
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“…7(b)], E a is estimated from the slope of the tangential line at the same temperature as in the previous report (above 200 K). 12) The estimated value of E a is 8.2 meV. The small activation energy is analogous with the temperature dependence of the resistance of superconducting BDD above T c .…”
Section: Electronic Structures Of Al-3p and C-2pmentioning
confidence: 79%
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“…7(b)], E a is estimated from the slope of the tangential line at the same temperature as in the previous report (above 200 K). 12) The estimated value of E a is 8.2 meV. The small activation energy is analogous with the temperature dependence of the resistance of superconducting BDD above T c .…”
Section: Electronic Structures Of Al-3p and C-2pmentioning
confidence: 79%
“…7(a)]. In a previous report, 12) the activation energy E a of a lightly ADD sample (2:5 Â 10 16 cm −3 , 1:4 Â 10 À5 at. %) was estimated to be 0.31 eV.…”
Section: Electronic Structures Of Al-3p and C-2pmentioning
confidence: 96%
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“…This study was done to provide further confirmation of metastable diamond growth. At boron concentrations higher than 10 17 to 10 18 cm −3 , an impurity band forms and the acceptor gap is reduced [31][32][33][34]. The boron-doping agent is usually added through small amounts of diborane, trimethyl boron, or organic borates in the source gases, but solid-state boron sources have also been successfully used.…”
Section: Doping Of Diamondmentioning
confidence: 99%
“…1/s). Based on these equations, reasonable fits have been achieved for the low temperature data (see for example Ref [19,57,58]…”
mentioning
confidence: 96%