Electrical conductivity and structural properties of a-C:N films deposited by ion-assisted pulse-arc sputtering

Streletskiy, Oleg A.; Zavidovskiy, Ilya A.; Nischak, O.Yu.; Dvoryak, S. V.

doi:10.1016/j.tsf.2020.137948

Cited by 16 publications

(11 citation statements)

References 42 publications

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“…The optimum deposition conditions were found to be a distance between the target and the substrates of 1 m; 3000 pulses of carbon plasma; voltage for an arc discharge ignited between the main discharge cathode holding the source of carbon and the main discharge anode holding the substrate of 300 V; charge of the main capacitor that formed pulses of carbon plasma of 2000 µf at 5 Hz; and Ar-ion plasma power of 150 W. The thickness of the carbyne-enriched layer was ~50 nm. Previous Raman and X-ray photoelectron spectroscopy study confirmed that the carbyne-like sp 1 -hybridized structures were present in the samples [13,14]. Figure 1e shows that for the highest ion plasma power of 300 W, a few relatively large pinholes (with diameter greater than 1 µm) appeared.…”

Section: Methodssupporting

confidence: 55%

Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

et al. 2022

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Due to the unique combination of physicochemical and structural properties of carbyne-enriched nanocoatings, they can be used for the development of high-end electronic devices. We propose using it for the development of sensor platforms based on silicon bulk micromachined membranes that serve as a part of microcapacitors with flexible electrodes, with various sizes and topologies. The carbyne-enriched nanocoating was grown using the ion-assisted pulse-plasma deposition method in the form of 2D-ordered linear-chain carbon with interchain spacing in the range of approximately 4.8–5.03 Å. The main characteristics of the fabricated sensors, such as dynamic range, sensitivity, linearity, response, and recovery times, were measured as a function of the ethanol concentration and compared for the different sizes of the micromembranes and for the different surface states, such as patterned and non-patterned. The obtained results are the first step in the further optimization of these sensor platforms to reach more precise detection of volatile organic compounds for the needs of the healthcare, air monitoring, and other relevant fields of human health.

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Section: Methodssupporting

confidence: 55%

Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

et al. 2022

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“…10. The fragments of the self-organized patterns observed for the samples grown at various ion assistance energies are based on the research results obtained in the paper [9].…”

Section: Pattern Excitation Phenomena In the Model Experimental Systemsmentioning

confidence: 98%

Tuning the Spatially Controlled Growth, Structural Self-Organizing and Cluster-Assembling of the Carbyne-Enriched Nano-Matrix during Ion-Assisted Pulse-Plasma Deposition

Lukin¹,

Gülseren²

2022

Fluid Dynamics &Amp; Materials Processing

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Carbyne-enriched nanomaterials are of current interest in nanotechnology-related applications. The properties of these nanomaterials greatly depend on their production process. In particular, structural self-organization and auto-synchronization of nanostructures are typical phenomena observed during the growth and heteroatom-doping of carbyne-enriched nanostructured metamaterials by the ion-assisted pulse-plasma deposition method. Accordingly, fine tuning of these processes may be seen as the key step to the predictive designing of carbyneenriched nano-matrices with improved properties. In particular, we propose an innovative concept, connected with application of the vibrational-acoustic effects and based on universal Cymatics mechanisms. These effects are used to induce vibration-assisted self-organized wave patterns together with the simultaneous manipulation of their properties through an electric field. Interaction between the inhomogeneous electric field distribution generated on the vibrating layer and the plasma ions serves as the additional energizing factor controlling the local pattern formation and self-organization of the nano-structures.

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“…Transmission electron microscopy has demonstrated that the structure of a nanomatrix grown without ion-assistance is homogeneous, while the structure of nanomatrices grown with ion-assistance becomes inhomogeneous [ 37 ]. For the case of doping a 2D-ordered linear-chain carbon nanomatrix with silver clusters, transmission electron microscopy has shown that, with an increase in the energy flux into the growing region, the average size of the active nucleation centers decreased with a simultaneous increase of their quantity [ 38 ].…”

Section: Vibration-assisted Activation Of the Pulse-plasma Growth Zonementioning

confidence: 99%

Tailoring Vibrational Signature and Functionality of 2D-Ordered Linear-Chain Carbon-Based Nanocarriers for Predictive Performance Enhancement of High-End Energetic Materials

Lukin¹,

Gülseren

2022

Nanomaterials

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A recently proposed, game-changing transformative energetics concept based on predictive synthesis and preprocessing at the nanoscale is considered as a pathway towards the development of the next generation of high-end nanoenergetic materials for future multimode solid propulsion systems and deep-space-capable small satellites. As a new door for the further performance enhancement of transformative energetic materials, we propose the predictive ion-assisted pulse-plasma-driven assembling of the various carbon-based allotropes, used as catalytic nanoadditives, by the 2D-ordered linear-chained carbon-based multicavity nanomatrices serving as functionalizing nanocarriers of multiple heteroatom clusters. The vacant functional nanocavities of the nanomatrices available for heteroatom doping, including various catalytic nanoagents, promote heat transfer enhancement within the reaction zones. We propose the innovative concept of fine-tuning the vibrational signatures, functionalities and nanoarchitectures of the mentioned nanocarriers by using the surface acoustic waves-assisted micro/nanomanipulation by the pulse-plasma growth zone combined with the data-driven carbon nanomaterials genome approach, which is a deep materials informatics-based toolkit belonging to the fourth scientific paradigm. For the predictive manipulation by the micro- and mesoscale, and the spatial distribution of the induction and energy release domains in the reaction zones, we propose the activation of the functionalizing nanocarriers, assembled by the heteroatom clusters, through the earlier proposed plasma-acoustic coupling-based technique, as well as by the Teslaphoresis force field, thus inducing the directed self-assembly of the mentioned nanocarbon-based additives and nanocarriers.

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Electrical conductivity and structural properties of a-C:N films deposited by ion-assisted pulse-arc sputtering

Cited by 16 publications

References 42 publications

Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

Tuning the Spatially Controlled Growth, Structural Self-Organizing and Cluster-Assembling of the Carbyne-Enriched Nano-Matrix during Ion-Assisted Pulse-Plasma Deposition

Tailoring Vibrational Signature and Functionality of 2D-Ordered Linear-Chain Carbon-Based Nanocarriers for Predictive Performance Enhancement of High-End Energetic Materials

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