2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) 2013
DOI: 10.1109/memsys.2013.6474290
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Electrical conductivity and Seebeck coefficient measurements of single nanowires by utilizing a microfabricated thermoelectric nanowire characterization platform

Abstract: We demonstrate the fabrication and improvements of our next generation Thermoelectric Nanowire Characterization Platform (TNCP) that is utilized to investigate the thermoelectric properties of individual nanowires to obtain the Seebeck coefficient S, electrical conductivity ı and thermal conductivity ț from the same test specimen. Only from these data, the so-called figure of merit ZT can be obtained for a single nanowire. In order to analyze the structural composition of single nanowires the TNCP has also to … Show more

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Cited by 15 publications
(9 citation statements)
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“…The thermoelectric nanowire characterization platform (TNCP) was produced by silicon micromachining. 20 This platform consists of two symmetric freestanding cantilevers with a minimum gap distance of 4 µm. The electrical components such as meander-shaped micro heaters (H l , H r ), resistance thermometers in four-point arrangement (T l , T r ) and additional electrodes (E l , E r ) are depicted in Fig.…”
Section: B Functionality Of the Tncpmentioning
confidence: 99%
“…The thermoelectric nanowire characterization platform (TNCP) was produced by silicon micromachining. 20 This platform consists of two symmetric freestanding cantilevers with a minimum gap distance of 4 µm. The electrical components such as meander-shaped micro heaters (H l , H r ), resistance thermometers in four-point arrangement (T l , T r ) and additional electrodes (E l , E r ) are depicted in Fig.…”
Section: B Functionality Of the Tncpmentioning
confidence: 99%
“…In addition, annealing in He and Te atmosphere was performed on ternary nanowires to optimize their transport properties. The transport properties of the nanowires were measured by two different approaches: (i) electrical contacts were applied to individual nanowires by laser lithography to determine the electrical conductivity, the thermopower, and the power factor along the nanowire, (ii) a microfabricated thermoelectric nanowire characterization platform (TNCP) was designed for measurements of thermopower, electrical conductivity, and thermal conductivity of single nanowires along the wire axis . The platform is composed of two free‐standing Si cantilevers, an insulating SiO 2 /Si 3 N 4 layer stack to prevent thermal and electrical current leakage, electrodes, joule microheaters, and temperature sensors.…”
Section: Methodsmentioning
confidence: 99%
“…The thermoelectric nanowire characterization platform (TNCP) is an Si micro‐machined chip fitting the geometric requirements of conventional TEM specimen holders of a maximum diameter of 3 mm, as shown in Fig. a.…”
Section: Methodsmentioning
confidence: 99%