Electrical conductivity and interface phenomena in thin-film heterostructures based on lithium niobate and lithium tantalate
Gudkov S. I.,
Solnyshkin A. V.,
Zhukov R. N.
et al.
Abstract:In this work, the electrophysical properties of metal-ferroelectric-semiconductor structures --- Cu/LiNbO3/Si and Ag/LiTaO3/Si --- with a ferroelectric layer thickness of 200 nm have been studied. The ferroelectric layers were deposited by RF magnetron sputtering. A topography study of thin film surface revealed a grain structure. The electrical conductivity mechanisms in Cu/LiNbO3/Si and Ag/LiTaO3/Si were considered. In a dependence of bias voltage value, there are a space charge-limited current, hopping cond… Show more
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