Electrical Conduction Properties of Titanium Added Aluminum Nitride Substrates at High Temperatures and Electric Fields

Okumura, Daigo; Hamasuna, Kyouhei; Kozako, Masahiro; Hikita, Masayuki; Nagami, Tomohito; Yamamoto, Kouichi

doi:10.23919/cmd54214.2022.9991314

2022 9th International Conference on Condition Monitoring and Diagnosis (CMD) 2022

DOI: 10.23919/cmd54214.2022.9991314

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Electrical Conduction Properties of Titanium Added Aluminum Nitride Substrates at High Temperatures and Electric Fields

Daigo Okumura

Kyouhei Hamasuna

Masahiro Kozako

et al.

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Electrical Conduction Properties of Titanium Added Aluminum Nitride Substrates at High Temperatures and Electric Fields

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