2005
DOI: 10.1166/jnn.2005.207
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Electrical Characterization of Silicon Tips Using Conducting Atomic Force Microscopy

Abstract: The electrical properties of n-doped Si tips have been characterized in conducting atomic force microscopy under various conditions. Si tips with SiO2 layer on them present complex electric properties: which include a larger positive threshold bias, which is different from that of its doped semiconductor material. Silicon tips after removing their SiO2 layer had smaller positive threshold bias; such bias varied with the loading force: smaller loading forces corresponding to larger positive threshold biases, an… Show more

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