“…Transparent conducting, aluminum doped zinc oxide thin films (Al x Zn y O z , ZnO:Al) [37,38] contain about 2% wt aluminum and can be produced with spray pyrolysis [39,40,41,42,43,44], sol gel technology [45,46,47,48,49,50,51], electro deposition [52,53], vapor phase deposition [54,55], magnetron DC sputtering [56,57,58,59,60], magnetron RF sputtering [61,62,63,64] or a combination of both the sputter deposition methods [65,66,67,68,69,70,71,72,73,74,75,76,77,78,79,80,81,82]. Moreover, high quality deposition methods using thermal plasmas [83,84], (low pressure (LP), metal organic (MO), plasma enhanced (PE)) chemical vapor deposition (CVD) [85,86], electron beam evaporation [87], pulsed laser deposition [88,89,90,91,92,93] and atomic layer deposition [94] can be applied.…”