Electrical Characteristics of 100 MeV 28Si implantation in GaAs

Ali, Yousuf Pyar; Narsale, A.M.; Sidek, Othman; Damle, A.R.; Arora, B. M.

doi:10.1109/smelec.2006.380779

2006 IEEE International Conference on Semiconductor Electronics 2006

DOI: 10.1109/smelec.2006.380779

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Electrical Characteristics of 100 MeV 28Si implantation in GaAs

Yousuf Pyar Ali

A.M. Narsale

Othman Sidek

et al.

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Electrical Characteristics of 100 MeV 28Si implantation in GaAs

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References 5 publications

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