Electrical and optical properties of titanium oxynitride thin films

Mucha, Nikhil Reddy; Som, Jacob; Shaji, Surabhi; Fialkova, Svitlana; Apte, P. R.; Balamurugan, B.; Shield, Jeffrey E.; Anderson, Mark; Kumar, Dhananjay

doi:10.1007/s10853-019-04278-x

Cited by 38 publications

(29 citation statements)

References 61 publications

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“…The nitrogen deficiency could be attributed to incomplete nitridation of the coating due to the predominance of nitrogen out-diffusion over nitrogen in-diffusion at elevated temperatures [41,42]. Besides evidence of TiN oxidation reported in the literature [35,36,38,39], the evidence in favor of TiN oxidation process has been obtained by our group too using x-ray photoelectron spectroscopy and has been published separately [43]. The corrosion protective nature of TiN coatings was further analyzed by the EIS study.…”

Section: Potentiodynamic Polarization and Electrochemical Impedance Smentioning

confidence: 82%

Enhancement in corrosion resistance and vibration damping performance in titanium by titanium nitride coating

et al. 2020

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Titanium nitride (TiN) thin films are deposited on titanium (Ti) substrates by pulsed laser deposition and radio frequency magnetron sputtering. The main goal of this research is to improve the corrosion resistance and the vibration damping performance of the Ti substrates by surface modification of the substrates with TiN thin film coatings. Electrochemical results indicate that TiN films bring about a significant improvement in the corrosion resistance of the Ti disks in phosphate buffer saline solution. It is also observed that TiN deposited at room temperature has the best corrosion efficiency in terms of lower corrosion current density and more positive corrosion potential. From the damping measurements, it is observed that the damping ratios of the TiN-coated beams are one to two orders of magnitude greater than those of uncoated ones. Additionally, the damping amplitudes of the TiN coated beams have been observed to return to zero position faster than the uncoated beam. The energy dissipation due to internal friction at the beam-coating interface and inter-lamellae interface within TiN coatings can be the mechanism responsible for reducing vibration amplitudes of TiN-coated beams.

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Section: Potentiodynamic Polarization and Electrochemical Impedance Smentioning

confidence: 82%

Enhancement in corrosion resistance and vibration damping performance in titanium by titanium nitride coating

et al. 2020

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“…TiON nanoparticles present promising nanoadditives for electrode materials due to their conductivity, chemical resistance, and high surface area [ 23 , 24 , 25 , 26 , 27 , 28 ]. To test our TiON nanoparticles, we incorporate them into a carbon-fiber-nonwoven (CFN).…”

Section: Resultsmentioning

confidence: 99%

“…When immobilized on carbon nanotubes, the TiON composite materials can be used as electrodes for supercapacitors, where the capacity increases by a factor of 5 versus pristine carbon nanotube electrodes and by a factor of 2 compared to titanium oxide carbon/nanotube composites [ 9 ]. This example shows that TiON nanoparticles are capable of boosting the surface area as well as the conductivity, producing high-performance electrodes for energy storage applications [ 10 , 23 , 25 , 26 , 27 , 28 ].…”

Section: Introductionmentioning

confidence: 99%

Low-Temperature Synthesis of Titanium Oxynitride Nanoparticles

et al. 2021

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The synthesis of transition metal oxynitrides is complicated by extreme reaction conditions such as high temperatures and/or high pressures. Here, we show an unprecedented solution-based synthesis of narrowly dispersed titanium oxynitride nanoparticles of cubic shape and average size of 65 nm. Their synthesis is performed by using titanium tetrafluoride and lithium nitride as precursors alongside trioctylphosphine oxide (TOPO) and cetrimonium bromide (CTAB) as stabilizers at temperatures as low as 250 °C. The obtained nanoparticles are characterized in terms of their shape and optical properties, as well as their crystalline rock-salt structure, as confirmed by XRD and HRTEM analysis. We also determine the composition and nitrogen content of the synthesized particles using XPS and EELS. Finally, we investigate the applicability of our titanium oxynitride nanoparticles by compounding them into carbon fiber electrodes to showcase their applicability in energy storage devices. Electrodes with titanium oxynitride nanoparticles exhibit increased capacity compared to the pure carbon material.

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“…12−17 Although some work has been done on Cu-doped TiN and oxygen diffusion in Cu/TiN/Al, no in-depth experimental studies of Cu-doped TiN x O y films' physical properties have been published to the best of our knowledge. 18,19 Magnetron sputtering, 2,20,21 reactive sputtering, 22−24 pulsed laser deposition, 25 and atomic layer deposition (ALD) are the major technologies to produce TiN x O y thin films as they do not require elevated temperatures while providing good conformity. 6,26,27 The self-limiting nature of the ALD growth and the ability to grow on the shaded and even upside-down surfaces make this technology more favorable for certain applications.…”

Section: ■ Introductionmentioning

confidence: 99%

Structural, Optical, and Electronic Properties of Cu-Doped TiN_xO_y Grown by Ammonothermal Atomic Layer Deposition

Baron

Mikhlin

Мolokeev

et al. 2021

ACS Appl. Mater. Interfaces

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Copper-doped titanium oxynitride (TiN x O y ) thin films were grown by atomic layer deposition (ALD) using the TiCl 4 precursor, NH 3 , and O 2 at 420 °C. Forming gas was used to reduce the background oxygen concentration and to transfer the copper atoms in an ALD chamber prior to the growth initiation of Cu-doped TiN x O y . Such forming gas-mediated Cu-doping of TiN x O y films had a pronounced effect on their resistivity, which dropped from 484 ± 8 to 202 ± 4 μΩ cm, and also on the resistance temperature coefficient (TCR), which decreased from 1000 to 150 ppm °C−1 . We explored physical mechanisms causing this reduction by performing comparative analysis of atomic force microscopy, X-ray photoemission spectroscopy, X-ray diffraction, optical spectra, low-temperature transport, and Hall measurement data for the samples grown with and without forming gas doping. The difference in the oxygen concentration between the films did not exceed 6%. Copper segregated to the TiN x O y surface where its concentration reached 0.72%, but its penetration depth was less than 10 nm. Pronounced effects of the copper doping by forming gas included the TiN x O y film crystallite average size decrease from 57−59 to 32−34 nm, considerably finer surface granularity, electron concentration increase from 2.2(3) × 10 22 to 3.5(1) × 10 22 cm −3 , and the electron mobility improvement from 0.56(4) to 0.92(2) cm 2 V −1 s −1 . The DC resistivity versus temperature R(T) measurements from 4.2 to 300 K showed a Cu-induced phase transition from a disordered to semimetallic state. The resistivity of Cu-doped TiN x O y films decreased with the temperature increase at low temperatures and reached the minimum near T = 50 K revealing signatures of the quantum interference effects similar to 2D Cu thin films, and then, semimetallic behavior was observed at higher temperatures. In TiN x O y films grown without forming gas, the resistivity decreased with the temperature increase as R(T) = − 1.88T 0.6 + 604 μΩ cm with no semimetallic behavior observed. The medium range resistivity and low TCR of Cu-doped TiN x O y make this material an attractive choice for improved matching resistors in RF analog circuits and Si complementary metal−oxide−semiconductor integrated circuits.

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Electrical and optical properties of titanium oxynitride thin films

Cited by 38 publications

References 61 publications

Enhancement in corrosion resistance and vibration damping performance in titanium by titanium nitride coating

Enhancement in corrosion resistance and vibration damping performance in titanium by titanium nitride coating

Low-Temperature Synthesis of Titanium Oxynitride Nanoparticles

Structural, Optical, and Electronic Properties of Cu-Doped TiN_xO_y Grown by Ammonothermal Atomic Layer Deposition

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Electrical and optical properties of titanium oxynitride thin films

Cited by 38 publications

References 61 publications

Enhancement in corrosion resistance and vibration damping performance in titanium by titanium nitride coating

Enhancement in corrosion resistance and vibration damping performance in titanium by titanium nitride coating

Low-Temperature Synthesis of Titanium Oxynitride Nanoparticles

Structural, Optical, and Electronic Properties of Cu-Doped TiNxOy Grown by Ammonothermal Atomic Layer Deposition

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Structural, Optical, and Electronic Properties of Cu-Doped TiN_xO_y Grown by Ammonothermal Atomic Layer Deposition