Ge 1−x Sn x nanorods (NRs) with a nominal Sn content of 28% have been prepared by a modified microwavebased approach at very low temperature (140 °C) with Sn as growth promoter. The observation of a Sn-enriched region at the nucleation site of NRs and the presence of the low temperature -Sn phase even at elevated temperatures support a template-supported formation mechanism. The behaviour of two distinct Ge 1−x Sn x compositions with high Sn content of 17% and 28% upon thermal treatment has been studied and reveal segregation events occurring at elevated temperatures, but also demonstrate the temperature window of thermal stability. In situ transmission electron microscopy investigations revealed a diffusion of metallic Sn clusters through the Ge 1−x Sn x NRs associated with temperatures where the material composition changes drastically. These results are important for the explanation of distinct composition changes in Ge 1−x Sn x and the observation of solid diffusion combined with dissolution and redeposition of Ge 1−y Sn y (x>y) exhibiting a reduced Sn content. Absence of metallic Sn results in increased temperature stability by ~70 °C for Ge 0.72 Sn 28 NRs and ~60 °C for Ge 0.83 Sn 17 nanowires (NWs). In addition, a composition-dependent direct bandgap of the Ge 1−x Sn x NRs and NWs with different composition is illustrated using Tauc plots. ASSOCIATED CONTENT Supporting Information. Additional SEM, TEM, EDX and XRD data are provided. Moreover, a video for the phase separation in the TEM is supplied. This material is available free of charge via the Internet at http://pubs.acs.org.