1999
DOI: 10.1016/s0921-5107(98)00512-1
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Electrical and optical characterisation of vanadium in 4H and 6H–SiC

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Cited by 37 publications
(26 citation statements)
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“…Temperature-dependent Hall or resistivity measurements of both the vanadium-doped and HPSI samples often yield an activation energy ͑E a ͒ of 1.1 eV, although values up to 1.6 eV have also been measured in both types of material. [3][4][5] In unintentionally doped semi-insulating SiC, several different types of intrinsic point defects are observed, [6][7][8][9] but a defect level is reported for only one of them, the carbon vacancy, V C . 1 In neither type of material is the species responsible for the 1.1-eV level known.…”
Section: Introductionmentioning
confidence: 99%
“…Temperature-dependent Hall or resistivity measurements of both the vanadium-doped and HPSI samples often yield an activation energy ͑E a ͒ of 1.1 eV, although values up to 1.6 eV have also been measured in both types of material. [3][4][5] In unintentionally doped semi-insulating SiC, several different types of intrinsic point defects are observed, [6][7][8][9] but a defect level is reported for only one of them, the carbon vacancy, V C . 1 In neither type of material is the species responsible for the 1.1-eV level known.…”
Section: Introductionmentioning
confidence: 99%
“…shows dominant chemical elements observed in used wafers using Glow Discharge Mass Spectroscopy (GDMS). the II-VI detectors are not able to detect alpha particles most probably due to vanadium doping because it is known that vanadium creates deep recombination centers for electrons in SiC and suppress charge collection efficiency [5][6]. In Fig.…”
Section: Resultsmentioning
confidence: 99%
“…But the knowledge of their magnetooptical properties in SiC is still very incomplete or most often absent. Among the transition metals vanadium has been particularly well studied in 4H and 6H-SiC some decades ago for its use in microelectronic applications, e.g., vanadium doping in the 10 18 cm −3 concentration range, allowed to obtain highly resistive semi-insulating substrates by compensating residual donor and acceptor impurities [26][27][28][29][30][31][32]. As nowadays such substrates can be made with the use of intrinsic defects, generated under nonstoichiometric growth conditions, the research interest for this dopant has strongly diminished.…”
Section: Introductionmentioning
confidence: 99%