Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation

Abstract

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Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging

“…It is highly crystallized and showed strong texture with an intense 002 Y peak observed by XRD. Y-Ti alloys have an hexagonal structure with a 002-peak shifting between the one of titanium and the one of yttrium, except for the Y32Ti68 which is in an amorphous state [7]. Y-Zr-Al alloys showed also an hcp crystalline structure with a 002-peak shifting between the one of yttrium (in Y rich alloy composition) and the one of zirconium, characteristic of a solid solution [8].…”