We have prepared Cu(In,Ga)S2 films with an almost homogeneous Ga depth distribution using the two‐stage multi‐source evaporation process on soda lime glass (SLG) substrates with one of three different kinds of back contact: Mo(1000nm), ZnO(500nm), and Mo(30nm)/ZnO(500nm), respectively. We have investigated the depth profiles of Zn and Na (diffused from SLG) in Cu(In,Ga)S2 films by secondary ion mass spectroscopy (SIMS) and compare them to those in films prepared by single stage co‐evaporation. The efficiencies are higher on Mo/ZnO than they are on ZnO. It was observed by SIMS that the amount of Zn in Cu(In,Ga)S2 on Mo/ZnO is lower than it is in Cu(In,Ga)S2 on ZnO. The obtained efficiencies are generally higher with two‐stage evaporation than with single stage co‐evaporation. The Na concentration in Cu(In,Ga)S2 prepared by two‐stage evaporation is two orders of magnitude higher than in single stage co‐evaporated films. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)