“…7,8,10 While various processing techniques such as evaporation, metalorganic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), and electrodeposition can be used for thermoelectric thin-film fabrication, electrodeposition is attractive because it is a rapid and inexpensive process. [7][8][9][10][11][12][13][14] In this study, n-type bismuth telluride (Bi-Te) and p-type antimony telluride (Sb-Te) films were electrodeposited with varying bath compositions and electrodeposition potentials, respectively, and their thermoelectric properties were evaluated for thermopile sensor applications. A thermopile sensor was processed on a glass substrate by electrodeposition and photolithography of the n-type Bi-Te and the p-type Sb-Te films, and its thermal sensing properties were characterized by applying controlled temperature differences by using a thin-film heater formed on the thermopiles.…”