Abstract:Amorphous and microcrystalline silicon-germanium alloys, a-SixGel.x:H and gtc-SixGel.x:H, respectively, have been prepared by reactive magnetron sputtering (RMS) from pure crystalline Si and Ge targets in a hydrogen ambient using argon as the sputtering gas. We have investigated the structural, optical, and electronic properties of the as-deposited films. The optical and electrical properties, e.g., the ambipolar diffusion length, photoconductivity, and photosensitivity, were found to be comparable to those of… Show more
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