Elastic-property measurements of ultrathin films using atomic force acoustic microscopy

Kopycinska-Müller, Malgorzata; Geiss, Roy H.; Müller, Julian; Hurley, Donna C.

doi:10.1088/0957-4484/16/6/013

Cited by 83 publications

(41 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This allows both cross-talk free quantitative electromechanical characterization, and also provides insight into the local mechanical properties of the surface similar to atomic force acoustic microscopy. [195][196][197] Notably, both BE and DART signals can be used to substitute the sinusoidal excitation signal in more complex PFM spectroscopies, giving rise to a set of advanced quantitative spectroscopies. 198 Finally, the need to understand more subtle aspects of ferroelectric functionalities have given rise to a set of multidimensional spectroscopies exploring dependence of local response on driving amplitude to map ferroelectric non-linearities, time, time and bias, and first order reversal curve measurements.…”

Section: Iic Complex Excitations and Spectroscopiesmentioning

confidence: 99%

Ferroelectric or non-ferroelectric: Why so many materials exhibit “ferroelectricity” on the nanoscale

Vasudevan

Balke

Maksymovych

et al. 2017

Applied Physics Reviews

264

206

View full text Add to dashboard Cite

Ferroelectric materials have remained one of the foci of condensed matter physics and materials science for over 50 years. In the last 20 years, the development of voltage-modulated scanning probe microscopy techniques, exemplified by Piezoresponse force microscopy (PFM) and associated time-and voltage spectroscopies, opened a pathway to explore these materials on a single-digit nanometer level. Consequently, domain structures, walls and polarization dynamics can now be imaged in real space. More generally, PFM has allowed studying electromechanical coupling in a broad variety of materials ranging from ionics to biological systems. It can also be anticipated that the recent Nobel prize 1 in molecular electromechanical machines will result in rapid growth in interest in PFM as a method to probe their behavior on single device and device assembly levels. However, the broad introduction of PFM also resulted in a growing number of reports on nearly-ubiquitous presence of ferroelectric-like phenomena including remnant polar states and electromechanical hysteresis loops in materials which are non-ferroelectric in the bulk, or in cases where size effects are expected to suppress ferroelectricity. While in certain cases plausible physical mechanisms can be suggested, there is remarkable similarity in observed behaviors, irrespective of the materials system. In this review, we summarize the basic principles of PFM, briefly discuss the features of ferroelectric surfaces salient to PFM imaging and spectroscopy, and summarize existing reports on ferroelectric-like responses in non-classical ferroelectric materials. We further discuss possible mechanisms behind observed behaviors, and possible experimental strategies for their identification.3

show abstract

Section: Iic Complex Excitations and Spectroscopiesmentioning

confidence: 99%

Ferroelectric or non-ferroelectric: Why so many materials exhibit “ferroelectricity” on the nanoscale

Vasudevan

Balke

Maksymovych

et al. 2017

Applied Physics Reviews

264

206

View full text Add to dashboard Cite

show abstract

“…Calculations of M with nanocrystalline models that include intercrystalline material and the measured grain diameters agree with the measured AFAM values of M. A detailed discussion is available elsewhere. [13] …”

Section: Effects Of Film Thickness On Measurement Accuracymentioning

confidence: 99%

Quantitative Elastic‐Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy

et al. 2005

View full text Add to dashboard Cite

show abstract

“…The results of this study showed that the AFAM technique is sensitive enough to detect changes in the effective elastic modulus of nanocrystalline materials caused by the increasing content of the intercrystalline volume and that it is possible to use this technique to directly determine the elastic properties of nickel films as thin as 50 nm. [21] Characterization of Film-Substrate Interface…”

Section: Methodsmentioning

confidence: 99%

Mechanical Characterization of Thin Films by Use of Atomic Force Acoustic Microscopy

et al. 2010

View full text Add to dashboard Cite

The atomic force acoustic microscopy (AFAM) technique has been used to determine elastic properties of films with thicknesses decreasing from several hundreds of nanometers to several nanometers. It has been shown that metal films as thin as 50 nm can be characterized directly without the need to consider the influence of the substrate. For films with thicknesses ranging from about 30 to 50 nm, measurement parameters can be chosen such as to allow characterization of the elastic properties of either the film or the film–substrate interface. This attribute has been combined with the ability of the method to obtain qualitative stiffness images to show variations in the film–substrate adhesion. The AFAM technique has been also used to determine the indentation modulus of thin films of silicon oxide with thicknesses ranging from 7 to 28 nm. In this case, elastic properties of the substrate had to be considered. The examples of the applications of the AFAM method reported here for characterization of elastic properties of very thin films have shown that this technique has the lateral and depth resolution required to characterize the very thin films used nowadays in microelectronics industry.

show abstract

Elastic-property measurements of ultrathin films using atomic force acoustic microscopy

Cited by 83 publications

References 28 publications

Ferroelectric or non-ferroelectric: Why so many materials exhibit “ferroelectricity” on the nanoscale

Ferroelectric or non-ferroelectric: Why so many materials exhibit “ferroelectricity” on the nanoscale

Quantitative Elastic‐Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy

Mechanical Characterization of Thin Films by Use of Atomic Force Acoustic Microscopy

Contact Info

Product

Resources

About