2005
DOI: 10.1016/j.jallcom.2004.06.077
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Elastic modulus and hardness of Cu–Ta amorphous films

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Cited by 52 publications
(31 citation statements)
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“…The reference values of E Zr , E Cu , E Ti and E Ta are 125 [13], 128 [14], 128 [15], and 220 [8] GPa, respectively. The estimated and measured elastic moduli are plotted in Fig.…”
Section: Mechanical Propertiesmentioning
confidence: 99%
“…The reference values of E Zr , E Cu , E Ti and E Ta are 125 [13], 128 [14], 128 [15], and 220 [8] GPa, respectively. The estimated and measured elastic moduli are plotted in Fig.…”
Section: Mechanical Propertiesmentioning
confidence: 99%
“…Zeng et al [35] measured the elastic modulus of dense and pure Ta films -E=195 GPa. The measurements were performed by the nanoindentation technique.…”
Section: Compressive Strength Yield Strength and Elastic Modulusmentioning
confidence: 99%
“…The Cu-Ta system [3] is one example of such an alloy system: the enthalpy of mixing of Cu-Ta is +3 kJ/mol (0.03 eV/atom) [4]. Thin film Cu-Ta alloys have been prepared by ion beam assisted methods [5][6][7] and by physical vapor deposition (PVD) [8][9][10][11][12][13]. For the latter it is generally established that the as-deposited microstructure of the Cu-Ta alloys changes from a facecentered cubic (fcc) solid solution phase with (1 1 1) texture over an X-ray amorphous phase to a solid solution of either a-or b-Ta structure with increasing Ta content.…”
Section: Introductionmentioning
confidence: 99%