Elastic electron reflection for determination of the inelastic mean free path of medium energy electrons in 24 elemental solids for energies between 50 and 3400 eV

Werner, Wolfgang; Tomastik, C.; Cabela, Thomas; Richter, Gerald; Störi, H.

doi:10.1016/s0368-2048(00)00280-2

Cited by 77 publications

(47 citation statements)

References 37 publications

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“…The procedure used to acquire the experimental data has been described in detail before [25]. REELS data were taken for polycrystalline Fe, Co and Ni surfaces in the energy range between 300 and 3400 eV for normal incidence and an off-normal emission angle of 60…”

Section: Methodsmentioning

confidence: 99%

Analysis of reflection electron energy loss spectra (REELS) for determination of the dielectric function of solids: Fe, Co, Ni

Werner

2007

Surface Science

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A simple procedure is developed to simultaneously eliminate multiple scattering contributions from two reflection electron energy loss spectra (REELS) measured at different energies or for different experimental geometrical configurations. The procedure provides the differential inverse inelastic mean free path (DIIMFP) and the differential surface excitation probability (DSEP).The only required input parameters are the differential cross section for elastic scattering and a reasonable estimate for the inelastic mean free path (IMFP). No prior information on surface excitations is required for the deconvolution. The retrieved DIIMFP and DSEP can be used to determine the dielectric function of a solid by fitting the DSEP and DIIMFP to theory. Eventually, the optical data can be used to calculate the (differential and total) inelastic mean free path and the surface excitation probability. The procedure is applied to Fe, Co and Ni and the retrieved optical data as well as the inelastic mean free paths and surface excitation parameters derived from it are compared to values reported earlier in the literature. In all cases, reasonable agreement is found between the present data and the earlier results, supporting the validity of the procedure.

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Section: Methodsmentioning

confidence: 99%

Analysis of reflection electron energy loss spectra (REELS) for determination of the dielectric function of solids: Fe, Co, Ni

Werner

2007

Surface Science

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“…Werner et al 20,21 determined IMFPs from EPES experiments for 24 elemental solids (Be, C, Mg, Al, Si, Ti, V, Mn, Fe, Co, Ni, Cu, Zn, Ge, Mo, Pd, Ag, Te, Ta, W, Pt, Au, Pb and Bi) and energies between 50 and 3400 eV. They also fitted the Bethe equation (Eqn (5)) to their IMFPs using Fano plots and reported the resulting values ofˇand for each fit.…”

Section: Comparison With Epes-imfps Of Werner Et Almentioning

confidence: 99%

Experimental determination of electron inelastic mean free paths in 13 elemental solids in the 50 to 5000 eV energy range by elastic‐peak electron spectroscopy

Tanuma

Shiratori

Kimura

et al. 2005

Surface & Interface Analysis

140

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We have determined electron inelastic mean free paths (IMFPs) in C (graphite), Si, Cr, Fe, Cu, Zn, Ga, Mo, Ag, Ta, W, Pt and Au by elastic-peak electron spectroscopy (EPES) using Ni as a reference material for electron energies between 50 and 5000 eV. These IMFPs could be fitted by the simple Bethe equation for inelastic electron scattering in matter for energies from 100 to 5000 eV. The average root-mean-square (RMS) deviation in these fits was 9%. The IMFPs for Si, Cr, Fe, Cu, Ag, Ta, W, Pt and Au were in excellent agreement with the corresponding values calculated from optical data for energies between 100 and 5000 eV. While the RMS differences for graphite and Mo in these comparisons were large (27 and 17%, respectively), the average RMS difference for the other 11 elements was 11%. Similar comparisons were made between our IMFPs and values obtained from the TPP-2M predictive equation for energies between 100 and 5000 eV, and the average RMS difference for the 13 solids was 10.7%; in these comparisons, the RMS differences for Ta and W were relatively large (26% for each). A correction for surface-electronic excitations was calculated from a formula of Werner et al.; except for Si and Ga, the average correction was 5% for energies between 150 and 5000 eV. The satisfactory consistency between the IMFPs from our EPES experiments and the corresponding IMFPs computed from optical data indicates that the uncertainty of these IMFPs is about 11% for electron energies between 100 and 5000 eV. Similar comparisons with IMFPs from the EPES experiments of Werner et al. showed a consistency of 8% for energies between 200 and 5000 eV.

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“…[1,2] Alternatively, by emphasizing the physical process originating such region of the secondary electron spectrum, the technique is also referred to as electron Rutherford back scattering [3,4] or electron Compton scattering. [5 -7] Since the elastic peak intensity results from the interplay between elastic and inelastic scattering processes (the latter removing intensity from the elastic peak), EPES is well-suited, and it is indeed used, [3,8] to measure the total electron inelastic mean free path (IMFP), an application for which proper separation between elastic and inelastic spectral contributions is mandatory.…”

Section: Introductionmentioning

confidence: 99%

On the use of elastic peak electron spectroscopy (EPES) to measure the H content of hydrogenated amorphous carbon films

Filippi

Calliari

2008

Surface & Interface Analysis

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Quasi-elastic scattering of 1-2 keV electrons is considered with respect to measuring the H content in hydrogenated amorphous carbon (a-C : H) materials. Interest in the technique lies in the fact that H cannot be typically detected by electron spectroscopic means (AES or XPS for instance). The feasibility of the approach is demonstrated and a quantification procedure is proposed. At the same time however, limitations of the technique (electron stimulated H desorption, low intensity of the H related signal and its spectral interference with the π -plasmon peak) are discussed.

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Elastic electron reflection for determination of the inelastic mean free path of medium energy electrons in 24 elemental solids for energies between 50 and 3400 eV

Cited by 77 publications

References 37 publications

Analysis of reflection electron energy loss spectra (REELS) for determination of the dielectric function of solids: Fe, Co, Ni

Analysis of reflection electron energy loss spectra (REELS) for determination of the dielectric function of solids: Fe, Co, Ni

Experimental determination of electron inelastic mean free paths in 13 elemental solids in the 50 to 5000 eV energy range by elastic‐peak electron spectroscopy

On the use of elastic peak electron spectroscopy (EPES) to measure the H content of hydrogenated amorphous carbon films

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