Elaboration and characterization of barium silicate thin films

Post-annealing effects on the surface structure and carrier lifetime of evaporated BaSi2 films

“…The stronger peak is probably from BaCO 3 , which agrees with the Ba 3d 5=2 peak at 779.4 eV and the C 1s peak at 288.5-288.7 eV. 26,27) The weaker one is possibly from a barium silicate, since similar chemical shifts are reported for annealed Ba=SiO 2 structures. 27) Si 2p 3=2 peaks at 99.9-100.1 eV are also consistent with a barium silicate, Ba 2 SiO 4 .…”

CVD elaboration and in situ characterization of barium silicate thin films

“…Two contributions can be observed in O 1s line: one at 528 eV corresponding to barium oxide and one at 530 eV which could correspond to barium silicate. 8 In parallel, in the Si 2p line two contributions can be evidenced: in addition to the Si 0 one, a feature at 102.0 eV can be revealed for growth at 700 • C. Such a peak cannot be attributed to SiO 2 and its binding energy is consistent with the one of silicate component. 8 Thus, these deposition conditions allow both oxide and silicate growths, the temperature influencing their respective amount.…”

“…8 In parallel, in the Si 2p line two contributions can be evidenced: in addition to the Si 0 one, a feature at 102.0 eV can be revealed for growth at 700 • C. Such a peak cannot be attributed to SiO 2 and its binding energy is consistent with the one of silicate component. 8 Thus, these deposition conditions allow both oxide and silicate growths, the temperature influencing their respective amount. Limited thickness of the deposited layer is confirmed by the presence of Si 0 metallic contribution in Si 2p region.…”

“…It is clear in the Ba 4d region that, although the global area of the peak increases with increasing temperature, no significant difference is evidenced, and in the observed energy positions which are intermediate between the ones of barium oxide and silicate. 8 The most interesting information is given by O 1s and Si 2p regions. Two contributions can be observed in O 1s line: one at 528 eV corresponding to barium oxide and one at 530 eV which could correspond to barium silicate.…”

“…In a previous work, 8 the first steps of such a study have been presented. Metallic barium has been evaporated on silicon oxide films in order to study the reactivity of this system, with the help of core levels and valence band synchrotron-induced photoelectron spectroscopy (SP-PES) as well as transmission electron microscopy (TEM).…”