Abstract:Abstract-This paper presents a highly efficient sensitivitybased method for capacitance extraction, which models both systematic and random geometric variations. This method is applicable for BEM-based Layout Parasitic Extraction (LPE) tools. It is shown that, with only one system solve, the nominal parasitic capacitances as well as its relative standard deviations caused by both systematic and random geometric variations can be obtained. The additional calculation for both variations can be done at a very mod… Show more
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