Efficient Microwave Processing of Thin Films Based on Double-Ridged Waveguide

Abstract

Microwave heating has a wide range of applications in the fields of industrial heating and drying. However, when microwave heating is applied to the thin film, it will be challenging due to its low loss and large heat dissipation area. In this paper, a double-ridged waveguide for thin-film heating is proposed. The double ridge structure is employed to enhance the electric field, thereby increasing the power-loss density in the thin film. Firstly, a double-ridged waveguide, in which the electric field strength can be about 2.5 times that of the conventional waveguide, was designed based on the transverse resonance method and the electromagnetic field simulation. Then, a multiphysics model was built to analyze the heating performance of the ridged waveguide, in which the electromagnetic field and heat transfer are coupled. The simulation results show that the heating performance of the proposed waveguide will be 35.0 times that of the conventional waveguide. An experiment was carried out to verify the proposed model, showing that the experimental results are in accordance with the simulation results. Finally, the influences of the thickness of the film, the permittivity, the distance between two ridges, and the working state on heating performance and heating uniformity were also discussed.