Efficient mask characterization through automated contour and corner rounding extraction

Zimmermann, Rainer; Bekaert, Joost; Braylovska, Mariya; Baskaran, Balakumar; Philipsen, Vicky; Bohn, Martin; Bachmann, Michael; Klostermann, Ulrich; Hendrickx, Eric; Demmerle, Wolfgang

doi:10.1117/12.2675486

38th European Mask and Lithography Conference (EMLC 2023) 2023

DOI: 10.1117/12.2675486

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Efficient mask characterization through automated contour and corner rounding extraction

Rainer Zimmermann,

Joost Bekaert,

Mariya Braylovska

et al.

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Efficient mask characterization through automated contour and corner rounding extraction

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