The results of comprehensive investigations of a compact LT\!-preionized XeC1 laser are presented. It has been shown that the gas lifetime increased to more than three times if BCL. was used as a halogen donor instead of HC1. The analysis of chemical degradationproducts suggests the possibility of a "self-regeneration" of BCl,-containing gas mixtures, where volatile contaminants can be converted into solid roducts. The temporal and spatialdependences of the densities for several p1 asma components : Ne , Xe , Xe , Cl , XeCl and boron atoms we re measured by the dye laser absorption (gain) probing. The halogen donor depletion in volume and constricted phases of the discharge was traced by the temporal dependence of the ground-state boron atoms density. The evolution of filamentary instabilities in the discharge was monitored from the Stark broadening of Xe absorption lines.
I . INTRODUCTIONNowadays discharge-pumped excimer lasers are the most convenient sources of powerful UV-radiation.Besides, these lasers are very attractive objects for a number of investigations concerning variety of physical and chemical processes responsible for the output characteristics of these lasers. A large number of critical parameters (preionization, glow discharge formation and evolution, gas chemistry, etc.) related to excimer lasers makes it difficult to compare different laser systems and generalize the obtained results. These circumstances insist on a wide range comprehensive studies of excimer lasers to cover the complexity of actual processes.In this paper, we present the results of investigations of a compact UV-preionized XeCl laser, optimized for HC1 and BCl, halogen donors. The main topics of investigation were : gas mixture lifetime and gas chemistry studies, the discharge voltage and current measurements, and the spectroscopic diagnostics of the active medium.
. CJMPACT XeC1 LASERThe excimer laser used in ourjnvestigations was a home-made XeCl laser with an automatic preionization scheme'.A schematic diagram of the laser device is shown in Fig.l. The laser consists of a number of modules including a laser tube, a pulse-forming circuit, a gas circulation system, a gas chamber and HV-power supply.The laser tube is a Plexiglas cylinder ( in a commercial variant of this laser the tube is made of Teflon) with the length of 300 rmn. Inside the tube there are placed main electrodes and preionization pins, on the end-sides of the tube two dielectric mirrors ( R99%, R8-40% ) are mounted. The main electrodes are made of nickel nd they hare cylidrical surfaces. The total discharge volume was about 1X2X2O cm.The UV-preionization was performed by two rows of sparks formed between the cathode and 19 pins, made of stainless steel. Every pin is connected to a ceramic 138 / SPIE Vol. 1412 Gas and Metal Vapor Lasers andApplications(1991) O-8194-0502-7/91/$4.OO Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/22/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx capacitor C O.47 nF. The pu1s-forming circuit...