Efficient Directional Coupling between Silicon and Copper Plasmonic Nanoslot Waveguides: toward Metal−Oxide−Silicon Nanophotonics

Abstract

Coupling plasmonics and silicon photonics is the best way to bridge the size gap between macroscopic optics and nanodevices in general and especially nanoelectronic devices. We report on the realization of key blocks for future plasmonic planar integrated optics, nano-optical couplers, and nanoslot waveguides that are compatible both with the silicon photonics and the CMOS microelectronics. Copper-based devices provide for very efficient optical coupling, unexpectedly low propagation losses and a broadband sub-50 nm optical confinement. The fabrication in a standard frontline microelectronic facilities hints broad possibilities of hybrid opto-electronic very large scale integration.

Compact Antenna for Efficient and Unidirectional Launching and Decoupling of Surface Plasmons

“…Recently, Delacour et al [10] built a device that exhibits a silicon/slot-copper-line/silicon transmission of 40% to convert guided photons into plasmons and back to guided photons. And in 2010, Briggs et al [11] achieved an impressive 80% coupling from a semiconductor nanowaveguide to a polymer-on-gold dielectric-loaded waveguide.…”

In- and out-coupling devices for subwavelength waveguides. Part 2

“…Similar devices for light coupling from dielectric to plasmonic waveguides were demonstrated theoretically, as well as experimentally [11][12][13]. The length of the interaction region in various systems varied from a few micrometers [12] to tens and even hundreds of micrometers [14], depending on the types of the interacting waveguides.…”

“…The length of the interaction region in various systems varied from a few micrometers [12] to tens and even hundreds of micrometers [14], depending on the types of the interacting waveguides. Numerically computed and experimentally measured coupling efficiency at the wavelength 1.55 µm for coupling from a silicon waveguide to a plasmonic slot waveguide was 60% [12].…”

“…A similar function can be played by IODs on the basis of discrete scatterers with the Подобные устройства для ввода излучения из диэлектрических в плазмонные волноводы были продемонстрированы как теоретически, так и экспериментально [11][12][13]. Длина области связи в различных системах варьировалась от несколь-ких микрометров [12] до десятков и даже сотен микрометров [14], в зависимости от типов взаимо-действующих волноводов. Теоретически рассчи-танный и экспериментально измеренный коэффи-циент ввода излучения на длине волны 1,55 мкм из кремниевого волновода в щелевой плазмонный волновод составил 60% [12].…”

“…Длина области связи в различных системах варьировалась от несколь-ких микрометров [12] до десятков и даже сотен микрометров [14], в зависимости от типов взаимо-действующих волноводов. Теоретически рассчи-танный и экспериментально измеренный коэффи-циент ввода излучения на длине волны 1,55 мкм из кремниевого волновода в щелевой плазмонный волновод составил 60% [12].…”