2006
DOI: 10.1117/12.665301
|View full text |Cite
|
Sign up to set email alerts
|

Efficient diffractive collimator for edge-emitting laser diodes

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2012
2012
2012
2012

Publication Types

Select...
1

Relationship

0
1

Authors

Journals

citations
Cited by 1 publication
(1 citation statement)
references
References 0 publications
0
1
0
Order By: Relevance
“…Next, the elliptical zone plates were manufactured with the help of e-beam lithography according to the technology described in detail in [33,34]. They were fabricated as binary phase elements by means of the electron-beam device ZBA 20 (Jenoptic GmbH) on the resist layer and then transferred into the substrate by a standard etching procedure.…”
Section: Comparison With the Paraxial Elliptical Zone Plate-experimen...mentioning
confidence: 99%
“…Next, the elliptical zone plates were manufactured with the help of e-beam lithography according to the technology described in detail in [33,34]. They were fabricated as binary phase elements by means of the electron-beam device ZBA 20 (Jenoptic GmbH) on the resist layer and then transferred into the substrate by a standard etching procedure.…”
Section: Comparison With the Paraxial Elliptical Zone Plate-experimen...mentioning
confidence: 99%