Efficient design and optimization of MEMS by integrating commercial simulation tools

Nagler, Oliver; Trost, M.; Hillerich, B.; Kozlowski, F.

doi:10.1016/s0924-4247(98)00052-1

Cited by 26 publications

(11 citation statements)

References 3 publications

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“…Attempts were made to provide the coupling between FEM and electronic simulators [5] to enable a closed-loop simulation. But the usefulness of this method is very limited, because of the long calculation times of FEM simulations.…”

Section: Simulation Methodsmentioning

confidence: 99%

“…In [3], [5], best heater placement is investigated by using FEM simulations; the time-dependent behavior is studied using an electronic simulator based on SPICE. The authors point out that FEM provides rather accurate static results, e.g., temperature distributions, whereas electronic SPICE simulations are better suited for the investigation of dynamic processes such as warm-up procedures, especially when a feedback temperature control is in operation.…”

Section: Introductionmentioning

confidence: 99%

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Application of finite element method and SPICE simulation for design optimization of oven-controlled crystal oscillators

Hillerich¹,

Nagler²

2001

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Thermal finite element method (FEM) calculations and SPICE-based dynamic thermal models are used to simulate and optimize the static and dynamic performance of miniaturized oven-controlled crystal oscillators (OCXOs). FEM can be used to generate the values of the SPICE circuit elements. Good agreement is achieved between simulation and measurement. Several application examples, including directly heated OCXOs, are discussed.

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Section: Simulation Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Application of finite element method and SPICE simulation for design optimization of oven-controlled crystal oscillators

Hillerich¹,

Nagler²

2001

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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“…Later Coultate et al (2008) applied a GA optimization to a MEMS accelerometer. Zhou (1998);Campbell (2000); Gupta and Mukherjee (2000) as well as Ren et al (2001) provide other examples of the optimization of capacitive MEMS accelerometers, whereas Nagler et al (1998) and Han and Kwak (2004) introduced the optimization of piezoresistive devices. Zhou (1998) presented the special focus of area miniaturization of MEMS accelerometers.…”

Section: Introductionmentioning

confidence: 99%

A robust and flexible optimization technique for efficient shrinking of MEMS accelerometers

et al. 2009

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We report on the automated determination of the minimal required area of a MEMS accelerometer conforming to given specifications. For a realistic nonlinear sensor model this process is only possible by the use of numerical optimization, which typically has the difficulty of finding the global minimum or is time consuming. A miniaturized sensor's chip size reduces manufacturing cost and leads to more competitive package sizes and new, unforeseen applications. Size reduction is especially important for consumer applications like mobile phones and navigation devices, where an increasing demand for accelerometers is expected in the near future. With further miniaturization of a sensor it is increasingly important to find the optimal design in order to use chip area as efficiently as possible. To achieve a robust and flexible automated area reduction without loss of functionality we uniquely combine available genetic and gradient-based optimization algorithms. Furthermore, we reduce the model complexity, apply different scaling techniques and adapt optimization algorithm settings. The application to a capacitive and a piezoresistive MEMS accelerometer shows significant improvement of efficiency when compared with the use of currently available optimization algorithms.

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“…The main advantage of micro electromechanical systems (MEMS), in addition to their small size, is the fact that the manufacturing costs are remarkably lower than compared to their bigger counterparts, due to the mass fabrication methods used to produce them. The target of research in rapid example of MEMS is to develop methodologies, tools and technologies needed to be able to automate the accurate design and construction of processes (Nagler et al 1998). Many different devices are under development ranging from single components as valves to complex micro fluid systems for chemical analyses, consisting of pumps, valves and flow sensors etc.…”

Section: Introductionmentioning

confidence: 99%

High viscous liquids as a source in micro-screw heat exchanger: fabrication, simulation and experiments

2007

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Efficient design and optimization of MEMS by integrating commercial simulation tools

Cited by 26 publications

References 3 publications

Application of finite element method and SPICE simulation for design optimization of oven-controlled crystal oscillators

Application of finite element method and SPICE simulation for design optimization of oven-controlled crystal oscillators

A robust and flexible optimization technique for efficient shrinking of MEMS accelerometers

High viscous liquids as a source in micro-screw heat exchanger: fabrication, simulation and experiments

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