2014
DOI: 10.1364/oe.22.010487
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Efficient, compact and low loss thermo-optic phase shifter in silicon

Abstract: We design a resistive heater optimized for efficient and low-loss optical phase modulation in a silicon-on-insulator (SOI) waveguide and characterize the fabricated devices. Modulation is achieved by flowing current perpendicular to a new ridge waveguide geometry. The resistance profile is engineered using different dopant concentrations to obtain localized heat generation and maximize the overlap between the optical mode and the high temperature regions of the structure, while simultaneously minimizing optica… Show more

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Cited by 307 publications
(190 citation statements)
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“…Overall, the obtained results outperform the performance of MZI switches based also on the placement the heaters on top of the cladding layer [6,9,12]. The best obtained figure of merit is also comparable to thermo-optic MZI switches based on doping the silicon to directly build the heaters into the waveguide (P π ·τ≈67 mW·µs in [11]). By means of this approach, the efficiency of the thermal process is maximized and a figure of merit as low as 30.5 mW·µs has been recently demonstrated [10].…”
Section: Resultsmentioning
confidence: 63%
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“…Overall, the obtained results outperform the performance of MZI switches based also on the placement the heaters on top of the cladding layer [6,9,12]. The best obtained figure of merit is also comparable to thermo-optic MZI switches based on doping the silicon to directly build the heaters into the waveguide (P π ·τ≈67 mW·µs in [11]). By means of this approach, the efficiency of the thermal process is maximized and a figure of merit as low as 30.5 mW·µs has been recently demonstrated [10].…”
Section: Resultsmentioning
confidence: 63%
“…Furthermore, an additional tuning mechanism, which will increase the total power consumption, is also necessary to counteract possible fabrication deviations [5]. On the other hand, silicon MZI switches have a wider optical bandwidth and higher robustness but usually suffer from a larger footprint and higher power consumption that limits the scalability to build switching fabrics with a large number of ports [6][7][8][9][10][11][12][13].…”
Section: Introductionmentioning
confidence: 99%
“…The majority of on-chip loss is attributed to a waveguide propagation loss of 2.4 dB/cm [52]. Each RBS unit cell, shown in 3B and C, contains four thermo-optic phase shifters [63] and two 50:50 splitting ratio directional couplers. The QPP phases can be programmed on microsecond timescales [63].…”
Section: Large-scale Linear Optical Circuitsmentioning
confidence: 99%
“…Although silicon ring resonators and in some cases Fabry-Perot (FP) resonators [23], can have high finesse they either require complex structures and metal depositions in highly defined manner or cannot be fabricated in in-fiber applications such as in-fiber modulators since they have to be implemented as part of an SOI chip [24][25][26][27][28]. Even though ring resonators can be made in e.g.…”
Section: Introductionmentioning
confidence: 99%