Efficiency of magnetic plasma filters

60 years of DLC coatings: Historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications

“…Vetter 23 construction is about 0.015 [111]. It is also possible to use higher bending angles, as shown previously in Fig.…”

“…Like DCVAE systems, the arc current supplied to the evaporator can be constant (DC), pulsed, or a combination of DC and pulsed. There are several reviews and books about FCVAE describing the scientific and technical solutions [79,80,[106][107][108][109][110][111][112]. However none of these are directed toward the deposition of DLC coatings.…”

“…There can be several reasons: macroparticles can bounce elastically from the duct surfaces, or they can shatter into multiple fragments having new trajectories, or small ones may transported electrostatically along with the ion flux to the substrates. To minimize the number of macroparticles that are transmitted through the duct, baffles are typically mounted perpendicular to the walls of the filter duct to prevent reflection of the macroparticles [111]. In tubular ducts, simple concentric rings with selected height and spacing are often used.…”

Nanocomposite Films Deposition by means of Various Filtered Vacuum Arc Systems

“…The effective approach to reduce the macro particles is based on the spatial separation of the trajectories of macro particles and ions [23].…”

Influence of a Scanning Radial Magnetic Field on Macroparticle Reduction of Arc Ion-Plated Films

“…The first is to magnetically filter the MPs from the plasma during transport [7,8]. While this method can effectively eliminate MP contamination, it greatly decreases deposition rate and dramatically increases coating costs [9][10][11].…”