Efficiency improvement of an E × B Penning discharge source by enhanced cross-field transport of electrons

Kim, June Young; Choi, Jin-Young; Choi, Jae-Young; Hwang, Y. S.; Chung, Kyoung-Jae

doi:10.1088/1361-6595/ac6a76

Cited by 5 publications

(3 citation statements)

References 23 publications

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“…Partially magnetized plasmas in cross-field discharge devices are used for a variety of applications, including electric propulsion and plasma processing [13,14]. There are unresolved mechanisms that cause a variety of turbulent fluctuations and structures [15,16], and they are still being investigated because they critically affect the performance of those devices [17,18]. Measurements of plasma parameters are vital for comprehending them and assessing device performance, and spectroscopic methods stand as a promising approach for evaluating these parameters in a noninvasive manner [19].…”

Section: Introductionmentioning

confidence: 99%

Application of helium line intensity ratio spectroscopy to xenon plasma in E × B Penning discharge

Sekine,

Diallo,

Abe

et al. 2024

Plasma Sources Sci. Technol.

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We propose the application of helium line intensity ratio spectroscopy in a low-pressure (0.3 mTorr) xenon E×B discharge at an electron temperature of $\sim$2 eV and a density of 1010-1011 cm-3. We successfully identified the helium atom line emissions at 388.9, 447.1, 501.6, 504.8, and 706.5 nm with helium pressures of up to ~20 mTorr. The measured electron temperature, density, and I-V characteristics of discharge remained almost constant in all helium pressures in the present experiment, indicating the suitability of the helium gas as a diagnostic gas. The results of helium line intensity ratio spectroscopy using the line emissions at 388.9, 447.1, and 504.8 nm showed fair agreement with the Langmuir probe measurement. Considering the trade-off relationship between the disturbance introduced by the helium gas and the signal-to-noise ratio, we conclude that a helium pressure of approximately 4 mTorr (approximately 13 times the partial pressure of xenon) represents the optimal pressure range for the application of the helium LIR method to this xenon plasma. It is found that the use of the line emissions at 501.6 and 706.5 nm result in a significant disturbance in the helium line intensity ratio method due to the radiation trapping effect.

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Section: Introductionmentioning

confidence: 99%

Application of helium line intensity ratio spectroscopy to xenon plasma in E × B Penning discharge

Sekine,

Diallo,

Abe

et al. 2024

Plasma Sources Sci. Technol.

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“…Summary and discussion of the results are provided in Section VIII. In various applications with axial magnetic field both cylinder and rectangular crosssection configurations are used [4][5][6][7][8][9] . We employ the rectangular geometry of the discharge, as shown in Figure 1, as our base case.…”

Section: Introductionmentioning

confidence: 99%

Azimuthal structures and turbulent transport in Penning discharge

M.¹,

Zadeh²,

Sharma³

et al. 2022

Preprint

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Azimuthal structures in cylindrical Penning discharge are studied with 2D3V radialazimuthal PIC/MCC model with the axial magnetic field. The discharge is selfconsistently supported by ionization due to the axial injection of electrons. It is shown that the steady-state discharge can be supported in two different regimes with different type of observed azimuthal structures. The transition between the regimes is controlled by the mechanism of the energy input to the discharge. In the first regime (low energy of the injected electrons), with the pronounced m = 1 spoke activity, the power input is dominated by the energy absorption due to the radial current and self-consistent electric field. In the other regime (higher energy of the injected electrons), with prevalent small scale m > 1 spiral structures, and the lower values of the anomalous transport, the total energy deposited to the discharge is lower and is mostly due to the direct input of the kinetic energy from the axial electron beam.We show that the large (m=1) spoke and small scale structures occur as a result of Simon-Hoh and lower hybrid instabilities driven by the electric field, density gradient, and collisions. We show that the spoke frequency follows the equilibrium ion rotation frequency.

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“…Plasma sources utilizing magnetic fields offer advantages in attaining a high-density plasma through strong confinement of charged particles or generating a desired plasma shape by controlling transport [1][2][3][4][5][6][7][8][9][10][11][12]. In recognition of these benefits, academia has established a classification system for industrial plasma sources with the characteristics of magnetized plasma, known as E × B devices.…”

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confidence: 99%

Experimental evidence of various mode numbers of azimuthal waves in an E×B Penning source for semiconductor processing

Cheon

Choi

Koo

et al. 2023

Plasma Sources Sci. Technol.

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This study presents the first experimental evidence for the existence of various mode numbers of azimuthal waves in an E×B Penning source used for semiconductor processing. To accurately measure these mode numbers, we utilized an eight-tip probe array aligned in an azimuthal direction to acquire spatiotemporal signals and applied the Beall analysis to obtain the dispersion relations. We combined seven dispersion relations obtained from distinct probe pairs to derive a single dispersion relation. This method allowed us to enhance the accuracy and reliability of the measurements. Our results show that the amplitude of the fast Fourier transformation (FFT) undergoes significant changes as the discharge voltage and magnetic field strength are varied. We observed that a distinguishable peak seen at low discharge voltage is divided into a wide range of dominant peaks up to eight when the discharge voltage is increased. The dispersion relation reveals that the phase velocity of each mode is proportional to the frequency. As the magnetic field strength increases, the amplitude of the FFT rapidly decreases except for a dominant peak corresponding to mode number 3. Ultimately, the low azimuthal mode dominates the azimuthal oscillation. Moreover, the radial profile of the FFT results shows that the frequencies of modes are nearly constant along the radial direction and have a maximum spectral magnitude at the periphery of the plasma core. Notably, as the amplitude of the modes increased, the maximum amplitude transitioned away from the core region. The findings from experiment with the multi-arrayed probe suggest the presence of a characteristics eigenmode in the E×B Penning source. This eigenmode appears to be a fundamental and pervasive feature of the system, spanning a range of mode numbers from low to high.

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Efficiency improvement of an E × B Penning discharge source by enhanced cross-field transport of electrons

Cited by 5 publications

References 23 publications

Application of helium line intensity ratio spectroscopy to xenon plasma in E × B Penning discharge

Application of helium line intensity ratio spectroscopy to xenon plasma in E × B Penning discharge

Azimuthal structures and turbulent transport in Penning discharge

Experimental evidence of various mode numbers of azimuthal waves in an E×B Penning source for semiconductor processing

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