Effects of Triton X-n Surfactants on the Fabrication of Si (110) On-Chip Micromirrors

Goh, Simon Chun Kiat; Chuan, KaiLiang; Tan, Chuan Seng

doi:10.1109/omn.2018.8454459

2018 International Conference on Optical MEMS and Nanophotonics (OMN) 2018

DOI: 10.1109/omn.2018.8454459

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Effects of Triton X-n Surfactants on the Fabrication of Si (110) On-Chip Micromirrors

Simon Chun Kiat Goh

KaiLiang Chuan

Chuan Seng Tan

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Effects of Triton X-n Surfactants on the Fabrication of Si (110) On-Chip Micromirrors

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References 9 publications

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