Effects of Thickness on Piezoelectric Properties of Highly Oriented Lead Zirconate Titanate Films

Park, Gun-Tae; Park, Chee-Sung; Choi, Joon‐Hwan; Lee, Jae-Wung; Kim, Hyoun‐Ee

doi:10.1111/j.1551-2916.2006.00988.x

Cited by 17 publications

(11 citation statements)

References 20 publications

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“…Our results show that the reduction of the film thickness from ∼50 to ∼20 nm in both pure and Ca-modified is accompanied by a decrease of the d 33 eff values, which is in agreement with the tendency already observed in similar thicker polycrystalline ferroelectric films, with values in the range of 0.5 to 8 m. 39,40 One of the possible factors causing this reduction of the piezoelectric activity may be the increase of the residual stress with the decrease of the film thickness. 6 and 7) on those grains showing the highest out-of-plane piezoresponse values.…”

Section: Resultssupporting

confidence: 92%

Fabrication of continuous ultrathin ferroelectric films by chemical solution deposition methods

et al. 2008

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The integration of ferroelectrics in nanodevices requires firstly the preparation of high-quality ultrathin films. Chemical solution deposition is considered a rapid and cost-effective technique for preparing high-quality oxide films, but one that has traditionally been regarded as unsuitable, or at least challenging, for fabricating films with good properties and thickness below 100 nm. In the present work we explore the deposition of highly diluted solutions of pure and Ca-modified lead titanates to prepare ultrathin ferroelectric films, the thickness of which is controlled by the concentration of the precursor solution. The results show that we are able to obtain single crystalline phase continuous films down to 18 nm thickness, one of the lowest reported using these methods. Below that thickness, the films start to be discontinuous, which is attributed to a microstructural instability that can be controlled by an adequate tailoring of the processing conditions. The effect of the reduction of thickness on the piezoelectric behavior is studied by piezoresponse force microscopy. The results indicate that films retain a significant piezoelectric activity regardless of their low thickness, which is promising for their eventual integration in nanodevices, for example, as transducer elements in nanoelectromechanical systems.

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Section: Resultssupporting

confidence: 92%

Fabrication of continuous ultrathin ferroelectric films by chemical solution deposition methods

et al. 2008

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“…In principle, however, this mechanism may be more generally applicable to other systems where the single crystal composition can be formed by reaction synthesis of two compositionally distinct phases. An important proviso is the suppression of multiple nucleation, which potentially could be achieved by top seeding with a single crystal and controlling the growth temperature. In terms of technological importance, ferroelectric and relaxor materials are clearly good candidates for further exploration of this crystal synthesis route.…”

Section: Discussionmentioning

confidence: 99%

Single crystal growth of CoTi₂O₅ by solid state reaction synthesis

et al. 2019

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Materials in single crystal form are often sought after because the absence of grain boundaries can result in unique properties relative to the polycrystal, but producing these materials is typically a slow and complex process. In this work, pseudo single crystals of the pseudobrookite compound CoTi2O5 were synthesized by solid‐state reaction from a duplex grain mixture of CoTiO3 and TiO2. The size of the crystallites was >250 µm. The transformation and subsequent microstructural evolution of the CoTi2O5 was studied by scanning electron microscopy (SEM), electron backscatter diffraction (EBSD), transmission electron microscopy (TEM), scanning transmission electron microscopy (STEM), and X‐ray diffraction (XRD). A novel growth mechanism was identified whereby a single crystal CoTi2O5 front advances simultaneously along multiple CoTiO3/TiO2 diphasic boundaries. The single crystal domains were composed of subgrains approximately 5 µm in diameter; differences in the subgrain size and misorientation were related to the growth mechanism and the initial grain size of the duplex CoTiO3–TiO2 mixture. CoTi2O5 is a little characterized compound, and this study represents the most significant microstructural study of CoTi2O5 to date. The findings may be applied to similar pseudobrookite compounds such as MgTi2O5 and Al2TiO5.

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“…16 Some studies have reported the improved properties of thin films with increasing film thickness, but only up to 10 mm. [17][18][19] Lebedev and Akedo 20 also reported the improved properties of thicker PZT films with thicknesses up to 60 mm fabricated by AD process.…”

Section: Introductionmentioning

confidence: 95%

“…The interface clamping effect is usually decreased with increasing film thickness, thereby easing the domain movement and improving the electric properties 16 . Some studies have reported the improved properties of thin films with increasing film thickness, but only up to 10 μm 17–19 . Lebedev and Akedo 20 also reported the improved properties of thicker PZT films with thicknesses up to 60 μm fabricated by AD process.…”

Section: Introductionmentioning

confidence: 99%

Effect of Film Thickness on the Piezoelectric Properties of Lead Zirconate Titanate Thick Films Fabricated by Aerosol Deposition

Han

Ryu

Yoon

et al. 2011

Journal of the American Ceramic Society

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Lead zirconate titanate (PZT) thick films with uniformly dispersed submicrometer pores were successfully fabricated on platinized silicon substrates with various thicknesses ranging from 1 μm to over 100 μm by aerosol deposition. Mixed powders of PZT and polyvinylidene fluoride (PVDF) were deposited for initial fabrication of composite films. After burn‐out of the PVDF phase from the composite films during postannealing processing at 700°C, uniformly dispersed submicrometer pores capable of relaxing the residual stress were generated in the PZT thick films. The dielectric and piezoelectric properties were improved with increasing film thickness due to the minimization of the interfacial clamping effect.

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Effects of Thickness on Piezoelectric Properties of Highly Oriented Lead Zirconate Titanate Films

Cited by 17 publications

References 20 publications

Fabrication of continuous ultrathin ferroelectric films by chemical solution deposition methods

Fabrication of continuous ultrathin ferroelectric films by chemical solution deposition methods

Single crystal growth of CoTi₂O₅ by solid state reaction synthesis

Effect of Film Thickness on the Piezoelectric Properties of Lead Zirconate Titanate Thick Films Fabricated by Aerosol Deposition

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Effects of Thickness on Piezoelectric Properties of Highly Oriented Lead Zirconate Titanate Films

Cited by 17 publications

References 20 publications

Fabrication of continuous ultrathin ferroelectric films by chemical solution deposition methods

Fabrication of continuous ultrathin ferroelectric films by chemical solution deposition methods

Single crystal growth of CoTi2O5 by solid state reaction synthesis

Effect of Film Thickness on the Piezoelectric Properties of Lead Zirconate Titanate Thick Films Fabricated by Aerosol Deposition

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Single crystal growth of CoTi₂O₅ by solid state reaction synthesis