The ability to synthesize semiconductor nanowires with deterministic and tunable control of orientation and morphology on a wide range of substrates, while high precision and repeatability are maintained, is a challenge currently faced for the development of many nanoscale material systems. Here we show that atomic layer deposition (ALD) presents a reliable method of surface and interfacial modification to guide nanowire orientation on a variety of substrate materials and geometries, including high-aspect-ratio, three-dimensional templates. We demonstrate control of the orientation and geometric properties of hydrothermally grown single crystalline ZnO nanowires via the deposition of a ZnO seed layer by ALD. The crystallographic texture and roughness of the seed layer result in tunable preferred nanowire orientations and densities for identical hydrothermal growth conditions. The structural and chemical relationship between the ALD layers and nanowires was investigated with synchrotron X-ray diffraction, high-resolution transmission electron microscopy, and X-ray photoelectron spectroscopy to elucidate the underlying mechanisms of orientation and morphology control. The resulting control parameters were utilized to produce hierarchical nanostructures with tunable properties on a wide range of substrates, including vertical micropillars, paper fibers, porous polymer membranes, and biological substrates. This illustrates the power of ALD for interfacial engineering of heterogeneous material systems at the nanoscale, to provide a highly controlled and scalable seeding method for bottom-up synthesis of integrated nanosystems. S emiconductor nanowires (NWs) represent a critical building block for nanoscale materials and systems owing to the novel optical, electronic, mechanical, thermal, and magnetic properties associated with a one-dimensional geometry. 1 A variety of synthesis approaches have been developed to form high-quality, single-crystalline NWs, including several bottom-up approaches based on solution or gas-phase processing. 1,2 These approaches have several potential advantages over subtractive processes, including a reduced number of processing steps and complexity, reduced raw material usage and cost, in situ doping, and the ability to create novel 3-D hierarchical and core−shell structures. 3−15 However, the ability to control the morphology and relative angular orientation of bottom-up NW arrays over large areas and on a variety of substrates that have different geometric, chemical, and crystallographic properties is a key challenge limiting our ability to manufacture integrated nanosystems composed of heterogeneous materials.As material systems continue to mature and gain complexity, methods are needed that can guide NW growth behavior on complex 3-D surfaces with deterministic and highly reproducible control. This process should be compatible with a wide range of substrate materials and should be arbitrarily scalable to facilitate manufacturing. To accomplish this, there are several typical methods of...